Engineering Research Equipment: Microelectronic Fabrication Facility

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9622370 Anderson The Department of Electrical and Computer Engineering, Chemical Engineering, and Physics will purchase equipment to conduct research in engineering requiring microelectronic fabrication. The equipment will be used for several research projects including in particular: metal-semiconductor contacts for photodetectors and field effect transistors; electro-optic effects; dielectrophorectic filters; and far infrared effects in semiconductors. The equipment will greatly improve our overall capability in microelectronic fabrication which is utilized by many faculty, many students, local industry and in teaching. The primary focus is to achieve repeatable 1-2 um patterning for a variety of applications. To complement the proposal, the University will provide sole funding in expanding the Clean Room to house the new equipment. The University provides 1/3 cost sharing for the equipment. University personnel, skilled in electrical work, plumbing, air conditioning and electronics will assist in setting up the new equipment and in subsequent maintenance. The new equipment will also support the 15 faculty from our Center for Electronic and Electro-optic Materials (CEEM). This Center represents 5 departments and includes over 40 graduate students, some of whom will use the new equipment. ***