Engineering Research Equipment: Microelectronic Fabrication Facility

工程研究设备制造 : 微电子制造设备制造

• 批准号: 9622370
• 负责人: Wayne Anderson
• 金额: $ 8.45万
• 依托单位: SUNY at Buffalo
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-06-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9622370&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Microelectronic; Fabrication

9622370 Anderson The Department of Electrical and Computer Engineering, Chemical Engineering, and Physics will purchase equipment to conduct research in engineering requiring microelectronic fabrication. The equipment will be used for several research projects including in particular: metal-semiconductor contacts for photodetectors and field effect transistors; electro-optic effects; dielectrophorectic filters; and far infrared effects in semiconductors. The equipment will greatly improve our overall capability in microelectronic fabrication which is utilized by many faculty, many students, local industry and in teaching. The primary focus is to achieve repeatable 1-2 um patterning for a variety of applications. To complement the proposal, the University will provide sole funding in expanding the Clean Room to house the new equipment. The University provides 1/3 cost sharing for the equipment. University personnel, skilled in electrical work, plumbing, air conditioning and electronics will assist in setting up the new equipment and in subsequent maintenance. The new equipment will also support the 15 faculty from our Center for Electronic and Electro-optic Materials (CEEM). This Center represents 5 departments and includes over 40 graduate students, some of whom will use the new equipment. ***

9622370安德森电气和计算机工程，化学工程和物理系将购买设备进行工程研究，需要微电子制造。 该设备将用于几个研究项目，特别是：光电探测器和场效应晶体管的金属-半导体接触;电光效应;定向滤光器;以及半导体中的远红外效应。 该设备将大大提高我们在微电子制造的整体能力，这是由许多教师，许多学生，当地工业和教学使用。 主要重点是实现可重复的1-2微米图案化的各种应用。 为了补充这项建议，大学将提供唯一的资金，扩大洁净室，以容纳新设备。 大学提供1/3的设备费用分摊。 大学的电工、管道、空调和电子技术人员将协助安装新设备和进行随后的维修。 新设备还将支持我们的电子和电光材料中心（CEEM）的15名教师。 该中心代表5个部门，包括40多名研究生，其中一些人将使用新设备。 ***