Development of a Compact, Broad Range Magnetic Spectrometer for Ion Beam Analysis

9625960 Lanford该奖项旨在开发一种紧凑、宽范围的磁谱仪，用于材料研究的离子束分析。 该光谱仪设计用作卢瑟福背散射（RBS）的检测器，其将允许RBS光谱的测量具有与当前系统相同的方便性和精度，但具有超过十倍的更好的能量分辨率。 能量分辨率的这种数量级改进转化为RBS的近表面深度和质量分辨率的数量级改进。 利用该光谱仪，4 HeRBS对于所有靶核将具有优于（即小于）1amu的质量分辨率，并且将具有接近原子尺寸的近表面深度分辨率。 该光谱仪的一个新特点是能够测量RBS光谱与一个大的立体角中心在180度，其中运动学展宽最小化（dE/d=0）的所有目标质量。 扩展焦平面允许同时测量He+和He++离子的相对强度，以校正电荷分数效应。 虽然设计与RBS的需要作为主要关注，该谱仪也可以作为探测器在核反应分析（NRA）和能量反冲探测（ERD），其中高能量分辨率将再次转化为显着改善深度分辨率可达到这些分析方法。 %%% 该仪器有可能大大提高材料分析能力，并将为学生提供培训。 他将为工艺开发和设备制造提供重要的反馈。 ***

9625960 Lanford This award is to develop a compact, broad range magnetic spectrometer to be used in ion beam analysis for materials research. This spectrometer is designed to be used as a detector for Rutherford backscattering (RBS) wihich will allow the measurement of RBS spectra with equal ease and precision as current systems, but with more than a factor of ten better energy resolution. This order of magnitude improvement in energy resolution translates into an order of magnitude improvement in the near surface depth and mass resolution of RBS. With this spectrometer, 4HeRBS will have mass resolution better than (i.e. smaller than) 1 amu for all target nuclei and will have a near surface depth resolution approaching atomic dimensions. One novel feature of this spectrometer is the ability to measure RBS spectra with a large solid angle centered at 180o where kinematic broadening is minimized (dE/d=0) for all target masses. An extended focal plane allows the simultaneous measurement of relative intensity of He+ and He++ ions in order to correct for charge fraction effects. Although designed with the needs of RBS as a primary concern, this spectrometer can also be sued as a detector in nuclear reaction analysis (NRA) and energy recoil detection (ERD), where the high energy resolution will again translate into dramatic improvement in the depth resolution attainable by these analytic methods. %%% This instrument is likely to provide substantially improved capability for materials analysis, and will provide training to students. He will provide important feedback for processing development and device fabrication. ***