Acquisition of High Resolution Scanning Electron Microscope

购置高分辨率扫描电子显微镜

• 批准号: 9626366
• 负责人: James Wittig
• 金额: $ 14.93万
• 依托单位: Vanderbilt University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-08-01 至 1998-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9626366&HistoricalAwards=false
• 关键词: Acquisition; Resolution; Scanning; Electron; Microscope

9626366 Wittig The Materials Science Program at Vanderbilt University will acquire a high resolution scanning electron microscope (SEM) to support materials science research and education projects. This instrumentation represents the first joint commitment between the College of Arts and Science and the School of Engineering to develop the basic infrastructure for materials research. The existing SEM instrumentation, acquired from 1979 to 1982, has insufficient resolution to adequately characterize the diverse types of materials that comprise our expanding research efforts. A primary capability for a new instrument is variable accelerating voltage from 0.2 to 30 kV with resolution of at least 2 nm at 30 kV and 5 nm at l kV. This set of imaging parameters must not compromise the analytical capabilities for x-ray energy dispersive spectroscopy. In addition, the system will be fully automated with remote operation capabilities ald integrated into the Vanderbilt computer network. %%% A scanning electron microscope (SEM) is recognized as one of the most widely used materials characterization tools for analysis of all class of materials. The ability to image polymers, ceramics, metals, and semiconductors at nanometer resolution will impact every area of materials research at Vanderbilt. A high resolution SEM (HRSEM) will also strongly influence the educational development of our graduate students in Physics, Chemistry, and Engineering. ***

范德比尔特大学材料科学项目将获得一台高分辨率扫描电子显微镜（SEM），以支持材料科学研究和教育项目。该仪器代表了文理学院和工程学院首次共同致力于开发材料研究的基础设施。现有的扫描电镜仪器，从1979年到1982年获得，没有足够的分辨率来充分表征构成我们不断扩大的研究工作的各种材料。新仪器的主要功能是从0.2到30kv的可变加速电压，在30kv时分辨率至少为2nm，在1kv时分辨率至少为5nm。这套成像参数必须不影响x射线能量色散光谱的分析能力。此外，该系统将完全自动化，具有远程操作能力，并集成到范德比尔特计算机网络中。扫描电子显微镜（SEM）被认为是最广泛使用的材料表征工具之一，用于分析所有类别的材料。在纳米分辨率下对聚合物、陶瓷、金属和半导体成像的能力将影响范德比尔特大学材料研究的各个领域。高分辨率扫描电镜（HRSEM）也将强烈影响我们的研究生在物理，化学和工程的教育发展。＊＊＊