Physics and Simulation of Helicon Plasma Sources

螺旋等离子体源的物理与模拟

• 批准号: 9632377
• 负责人: John Scharer
• 金额: $ 20.73万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9632377&HistoricalAwards=false
• 关键词: Physics; Simulation; Helicon; Plasma; Sources

Proposal Number: ECS-9632377 Principal Investigator: John Scharer/University of Wisconsin Title: Physics and Simulation of Helicon Plasma Sources Abstract This research will provide a coordinated theoretical, computational and experimental research program on helicon plasma sources. These high density efficient sources are of interest for a variety of applications: neutral beam sub-micron etching of semiconductors, processing of large flat panel display, materials surface modification, use as a large volume plasma source for space simulations and for basic plasma source and wave propagation studies. Despite strong interest in these source few detailed simulations have been carried out to better model and understand helicon sources. The proposed study is very through and will address several important points. Among these are: incorporation of off diagonal hot plasmas dielectric tensor terms which describe transit time damping as well as Landau process, into the ANTENA2 code (developed by Professor Scharer) which is used to describe 3-D wave fields and radial collisional and collisionless power absorption for different helicon antenna coil configurations and radial plasma profiles. Also the ANTENA2 code will be interfaced to the INDUCT95 transport code to examine the self-consistent plasma profile evolution and the possibly differing roles of bulk and fast electrons as observed in experiments. The availability of the INDUCT95 code free of charge from an independent collaboration is a major gain to the proposed effort. The independent collaborators wants the opportunity to develop the INDUCT95 transport code in tandem with the ANTENA2 code. Also, as a service to the community, the ANTENA2 code will be made generally available to other researchers during the source of the grant to answer substantial requests for the code.

提案编号：ECS-9632377 主要研究者：John Scharer/威斯康星州大学 标题：螺旋等离子体源的物理和模拟 摘要 这项研究将提供一个协调的理论，计算和实验研究计划的螺旋等离子体源。 这些高密度高效的源是感兴趣的各种应用：中性束亚微米蚀刻的半导体，加工的大型平板显示器，材料表面改性，作为一个大容量的等离子体源空间模拟和基本的等离子体源和波传播的研究。 尽管强烈的兴趣，这些来源很少进行详细的模拟，以更好地建模和理解螺旋源。 拟议的研究非常全面，将涉及几个重要问题。 其中包括：将描述渡越时间阻尼以及朗道过程的非对角热等离子体介电张量项并入ANTENA 2代码（由Scharer教授开发），该代码用于描述不同螺旋天线线圈配置和径向等离子体轮廓的3-D波场和径向碰撞和无碰撞功率吸收。此外，ANTENA 2代码将接口到INDUCT 95传输代码，以检查自洽等离子体轮廓的演变和可能的不同作用的散装和快速电子在实验中观察到的。 独立合作机构免费提供的INDUCT 95代码是拟议工作的一个主要收获。 独立合作者希望有机会开发INDUCT 95传输代码与ANTENA 2代码。此外，作为对社区的一项服务，ANTENA 2代码将在赠款来源期间向其他研究人员提供，以回答对代码的大量请求。