Physics and Simulation of Helicon Plasma Sources

建议编号：ECS-9632377主要研究人员：约翰·谢勒/威斯康星大学标题：螺旋等离子体源的物理和模拟本研究将提供一个关于螺旋等离子体源的协调的理论、计算和实验研究计划。这些高密度的高效源具有广泛的应用价值：半导体的中性束亚微米刻蚀、大型平板显示器的加工、材料表面改性、用作空间模拟的大体积等离子体源以及基本的等离子体源和波传播研究。尽管人们对这些源很感兴趣，但为了更好地模拟和理解螺旋源，几乎没有进行过详细的模拟。拟议的研究非常透彻，将涉及几个重要的问题。其中包括：将描述渡越时间衰减和朗道过程的非对角热等离子体介电张量项纳入ANTENA2程序(由Scharer教授开发)中，该程序用于描述不同螺旋天线线圈配置和径向等离子体剖面的三维波场和径向碰撞和无碰撞功率吸收。此外，ANTENA2程序将与INDUCT95传输程序接口，以检查在实验中观察到的自洽等离子体轮廓演化以及体电子和快电子可能的不同作用。独立合作机构免费提供INDUCT95代码是拟议工作的一大收获。独立合作者希望有机会与ANTENA2代码一起开发INDUCT95传输代码。此外，作为对社区的一项服务，ANTENA2代码将在拨款来源期间向其他研究人员普遍提供，以回答对该代码的大量请求。

Proposal Number: ECS-9632377 Principal Investigator: John Scharer/University of Wisconsin Title: Physics and Simulation of Helicon Plasma Sources Abstract This research will provide a coordinated theoretical, computational and experimental research program on helicon plasma sources. These high density efficient sources are of interest for a variety of applications: neutral beam sub-micron etching of semiconductors, processing of large flat panel display, materials surface modification, use as a large volume plasma source for space simulations and for basic plasma source and wave propagation studies. Despite strong interest in these source few detailed simulations have been carried out to better model and understand helicon sources. The proposed study is very through and will address several important points. Among these are: incorporation of off diagonal hot plasmas dielectric tensor terms which describe transit time damping as well as Landau process, into the ANTENA2 code (developed by Professor Scharer) which is used to describe 3-D wave fields and radial collisional and collisionless power absorption for different helicon antenna coil configurations and radial plasma profiles. Also the ANTENA2 code will be interfaced to the INDUCT95 transport code to examine the self-consistent plasma profile evolution and the possibly differing roles of bulk and fast electrons as observed in experiments. The availability of the INDUCT95 code free of charge from an independent collaboration is a major gain to the proposed effort. The independent collaborators wants the opportunity to develop the INDUCT95 transport code in tandem with the ANTENA2 code. Also, as a service to the community, the ANTENA2 code will be made generally available to other researchers during the source of the grant to answer substantial requests for the code.