High Vacuum Systems Laboratory

高真空系统实验室

• 批准号: 9650916
• 负责人: Dave Hata
• 金额: $ 5.04万
• 依托单位: Portland Community College
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-07-01 至 1998-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9650916&HistoricalAwards=false
• 关键词: Vacuum; Systems; Laboratory

This project develops a high vacuum systems laboratory for a 2-year, associate of applied science degree program in Microelectronics Technology. This unique, advanced-level technical program prepares technicians for jobs in the wafer fab in our nation's expanding semiconductor industry. Wafer fab technicians need a working knowledge of high vacuum systems because high vacuum techniques are so pervasive in the manufacture of integrated circuits. Unfortunately, few colleges are prepared to offer high vacuum systems courses because of a lack of suitable training systems and a lack of appropriate instructional materials. To address this need, this project is purchasing six miniturbomolecular (high vacuum) pumping stations and three helium leak detectors to equip a technician-level, high vacuum systems laboratory, adapt them for educational use, and design laboratory experiments for these systems. Experiments can be compiled and published as a laboratory manual for use at other community colleges and technical institutes. Laboratory experiments include demonstrations of vacuum fundamentals, operation of the pumping station, gauging and pressure measurement techniques, and leak detection.

该项目开发了一个为期两年的高真空系统实验室，在微电子技术应用科学学位课程的副学士学位。这种独特的，先进的技术方案准备在我国不断扩大的半导体行业的晶圆制造业的工作技术人员。晶圆制造技术人员需要高真空系统的工作知识，因为高真空技术在集成电路制造中非常普遍。遗憾的是，由于缺乏合适的培训系统和适当的教学材料，很少有学院准备开设高真空系统课程。为了满足这一需要，该项目正在购买六个微型涡轮分子（高真空）泵站和三个氦泄漏探测器，以装备一个技术人员级的高真空系统实验室，使其适合教育用途，并为这些系统设计实验室实验。实验可以汇编和出版为实验室手册，供其他社区学院和技术学院使用。实验室实验包括真空基本原理、泵站操作、计量和压力测量技术以及泄漏检测的演示。