A Plasma-Aided Manufacturing Course for ATE Programs in Semiconductor Manufacturing and Related Fields

半导体制造及相关领域 ATE 项目的等离子体辅助制造课程

• 批准号: 0101533
• 负责人: Dave Hata
• 金额: --
• 依托单位: Portland Community College
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-09-01 至 2005-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0101533&HistoricalAwards=false
• 关键词: Plasma; Aided; Manufacturing; Course; ATE

Plasma is a manufacturing medium with unique properties, and its use has led to more efficient processes and products that could not be fabricated without them. Yet, despite the importance of plasma-aided manufacturing, few community colleges currently offer courses and prepare technicians in this critical technology. To address this urgent need, the project is developing essential resources that will enable community colleges to implement plasma-aided manufacturing courses. These resources include outcomes- based instructional materials, training systems in plasma technology, and workshops for community college faculty. Outcomes-based instructional materials are organized around three fundamental components of a plasma processing system. These fundamental components include plasma physics, RF power subsystems, and gas delivery subsystems. Modules on plasma applications, e.g. plasma etch, chemical vapor deposition, and sputtering, integrate the three fundamental components into a capstone-type learning experience for students. Laboratory improvement will focus on the design of plasma training systems at RF frequencies. Project staff are working with equipment suppliers to adapt current manufacturing systems for community college laboratories. Finally, faculty enhancement workshops provide hands-on opportunities with plasma training systems and disseminate instructional materials developed through this project.

等离子体是一种具有独特特性的制造介质，它的使用导致了更高效的工艺和产品，没有它们就无法制造。然而，尽管等离子体辅助制造的重要性，目前很少有社区学院提供课程，并准备在这一关键技术的技术人员。为了满足这一迫切需求，该项目正在开发必要的资源，使社区学院能够实施等离子辅助制造课程。这些资源包括基于结果的教学材料，等离子技术的培训系统，以及社区学院教师的研讨会。基于结果的教学材料围绕血浆处理系统的三个基本组成部分进行组织。这些基本组件包括等离子体物理、RF功率子系统和气体输送子系统。等离子体应用模块，例如等离子体蚀刻，化学气相沉积和溅射，将三个基本组成部分整合到学生的Capstone型学习体验中。实验室的改进将集中在射频等离子体训练系统的设计上。项目工作人员正在与设备供应商合作，为社区大学实验室改造现有的制造系统。最后，教师增强研讨会提供动手的机会，等离子体培训系统和传播通过这个项目开发的教学材料。