Control of Distributed Nonlinear Systems and Semiconductor Manufacturing

分布式非线性系统和半导体制造的控制

• 批准号: 9700588
• 负责人: Allen Tannenbaum
• 金额: $ 12.61万
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-10-01 至 2002-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9700588&HistoricalAwards=false
• 关键词: Control; Distributed; Nonlinear; Systems; Semiconductor

ECS-9700588 Tannenbaum The proposal deals with partial differential equation methods for the control of distributed and nonlinear systems. In particular, the focus is on the benchmark area of certain key semiconductor manufacturing processes including etching, deposition and lithography. We will also discuss some new directions we are taking on the robust control of distributed parameter systems using skew Toeplitz theory. This allows one to reduce the design of H -optimal and suboptimal compensators to finite dimensional linear algebra problem, the dimension of which only depends on the McMillan degrees of the weights and not the (state-space) dimension of the plant. Thus even for infinite dimensional systems, we are reduced to finite matrix manipulations. We will also consider some time-varying generalizations of these ideas.

ECS-9700588 Tannenbaum该提案涉及用于控制分布式和非线性系统的偏微分方程法。特别是，重点放在某些关键半导体制造工艺的基准领域，包括蚀刻、沉积和光刻。我们还将讨论利用斜Toeplitz理论研究分布参数系统的鲁棒控制的一些新方向。这使得人们可以将H-最优和次最优补偿器的设计归结为有限维线性代数问题，该问题的维度只取决于权值的McMillan度，而不取决于对象的(状态空间)维度。因此，即使对于无限维系统，我们也只能简化为有限的矩阵运算。我们还将考虑这些思想的一些随时间变化的概括。