CAREER: Micromechanical Engineering and MEMS

9702875金微机电系统（MEMS）是一种使能技术，开辟了一个新的科学前沿。 一个基本问题是，传统的工程科学在微米尺度上并不总是有效的。 由于人类的经验和我们受过教育的知识可能会在微观尺度上挑战适当的工程，因此引导学生重新构建他们的知识体系并形成自己的微工程学科是很重要的。在学术界，建立一个系统的和有效的结构，在机械工程的MEMS教育是我的目标。 我认为，其效果是通过利用MEMS技术来推进机械工程领域，并通过更平衡的专业知识来丰富MEMS研究。 为了实现这一目标，我们正在建立一个博士学位。在我们的机械和航空航天工程系加州大学洛杉矶分校的主要领域。 本研究计划以微米级液态金属液滴作为微机电系统的另一个组成部分。 在我的实验室中已经表明，可以在基底上的期望位置处形成微米量级的金属液滴阵列。 凭借其独特的性能，液态金属可以为MEMS器件开辟新的可能性。 汞和低熔点金属合金正在考虑之中。 该建议是针对大规模集成继电器（LSIR）的发展，它既有微型继电器的功能优势和大规模集成的半导体晶体管。 基于液滴中继单元结构简单、占地面积小的特点，LSIR芯片可容纳10 K ~ 1 M的中继呼叫，可用于信号多路复用的高性能、低密度LSIR，以及与CMOS芯片集成的高密度非易失性抗辐射存储器。 在教育计划中描述的MEMS课程中研究的尺度效应和表面物理学将在理解液滴行为方面发挥关键作用。 建议的一个目标是将从研究中获得的信息，如液滴的微尺度现象和制造技术，纳入MEMS课程。 ***

9702875 Kim Microelectromechanical systems (MEMS) is an enabling technology, opening a new scientific frontier. A fundamental issue is that the conventional engineering science is not always valid at the micrometer scale. Since human experience and our educated knowledge may defy proper engineering in microscale, it is important to lead students to re-construct their body of knowledge and form a discipline of its own for microengineering. It is my goal in academia to establish a systematic and effective structure for MEMS education in mechanical engineering. The effect, I believe, is advancement of mechanical engineering areas by taking advantage of MEMS technologies and also enrichment of MEMS research with more balanced expertise available. To reach this goal, we are establishing a Ph.D. major field in our Mechanical and Aerospace Engineering Department of UCLA. The research plan is to use micron-sized liquid-metal droplet as another building block for MEMS. It has been shown in my lab that an array of metal droplets on the order of micrometers can be formed at desired locations on substrate. With its unique properties, liquid metals can open new possibilities for MEMS devices. Mercury and low-melting-temperature metal alloys are being considered. The proposal is directed towards the development of Large-Scale Integrated Relay (LSIR), which has both the functional superiority of microrelays and the large-scale integration of semiconductor transistors. Based on the droplet-based relay cell, which has dramatically simple configuration and small foot area, an LSIR chip is expected to contain 10 K to 1 M calls of bistable relay on it. A high performance, low density LSIR will be developed for signal multiplexing and a high density device for non-volatile, radiation-hard memory to be integrated with CMOS chips. The scale effects and surface physics studied in the MEMS courses described in the education plan will play a critical role in understanding the behavior of the droplets. It is an objective of the proposal that the information obtained from the research, such as microscale phenomena of droplets and fabrication techniques, be incorporated into MEMS courses. ***