CAREER: Micromechanical Engineering and MEMS

职业：微机械工程和 MEMS

• 批准号: 9702875
• 负责人: Chang-Jin Kim
• 金额: $ 23.5万
• 依托单位: University of California-Los Angeles
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-07-01 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9702875&HistoricalAwards=false
• 关键词: CAREER; Micromechanical; Engineering; MEMS

9702875 Kim Microelectromechanical systems (MEMS) is an enabling technology, opening a new scientific frontier. A fundamental issue is that the conventional engineering science is not always valid at the micrometer scale. Since human experience and our educated knowledge may defy proper engineering in microscale, it is important to lead students to re-construct their body of knowledge and form a discipline of its own for microengineering. It is my goal in academia to establish a systematic and effective structure for MEMS education in mechanical engineering. The effect, I believe, is advancement of mechanical engineering areas by taking advantage of MEMS technologies and also enrichment of MEMS research with more balanced expertise available. To reach this goal, we are establishing a Ph.D. major field in our Mechanical and Aerospace Engineering Department of UCLA. The research plan is to use micron-sized liquid-metal droplet as another building block for MEMS. It has been shown in my lab that an array of metal droplets on the order of micrometers can be formed at desired locations on substrate. With its unique properties, liquid metals can open new possibilities for MEMS devices. Mercury and low-melting-temperature metal alloys are being considered. The proposal is directed towards the development of Large-Scale Integrated Relay (LSIR), which has both the functional superiority of microrelays and the large-scale integration of semiconductor transistors. Based on the droplet-based relay cell, which has dramatically simple configuration and small foot area, an LSIR chip is expected to contain 10 K to 1 M calls of bistable relay on it. A high performance, low density LSIR will be developed for signal multiplexing and a high density device for non-volatile, radiation-hard memory to be integrated with CMOS chips. The scale effects and surface physics studied in the MEMS courses described in the education plan will play a critical role in understanding the behavior of the droplets. It is an objective of the proposal that the information obtained from the research, such as microscale phenomena of droplets and fabrication techniques, be incorporated into MEMS courses. ***

9702875 KIM微电子机械系统(MEMS)是一项使能技术，开辟了一个新的科学前沿。一个根本的问题是，传统的工程科学并不总是在微米尺度上有效。由于人类经验和我们受过教育的知识可能会在微观尺度上违背适当的工程学，因此引导学生重建他们的知识体系并形成自己的微工程学学科是很重要的。建立一个系统有效的机械工程MEMS教育体系是我在学术界的目标。我相信，其效果是利用MEMS技术促进机械工程领域的进步，并利用现有的更平衡的专业知识丰富MEMS研究。为了实现这一目标，我们在加州大学洛杉矶分校的机械和航空航天工程系设立了一个博士专业。研究计划是使用微米级的液态金属液滴作为MEMS的另一块积木。我的实验室已经证明，可以在基片上的所需位置形成微米量级的金属液滴阵列。液态金属具有独特的性质，可以为MEMS器件提供新的可能性。汞和低温金属合金正在考虑之中。该方案针对大规模集成继电器(LSIR)的发展，它既具有微继电器的功能优势，又具有半导体晶体管的大规模集成。基于液滴中继单元结构简单、占地面积小的特点，一片LSIR芯片有望实现10K~1M次双稳中继。将开发一种高性能、低密度的LSIR用于信号多路复用，并开发一种用于非易失性、抗辐射的存储器与CMOS芯片集成的高密度器件。在教育计划中描述的MEMS课程中研究的尺度效应和表面物理将在理解液滴的行为方面发挥关键作用。该提案的一个目标是将从研究中获得的信息，如液滴的微尺度现象和制造技术，纳入MEMS课程。***