Development of a Local Electrode Atom Probe

局部电极原子探针的研制

• 批准号: 9703932
• 负责人: Thomas Kelly
• 金额: $ 9.24万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-09-15 至 2000-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9703932&HistoricalAwards=false
• 关键词: Development; Local; Electrode; Atom; Probe

9703932 Kelly This award provides partial support for a development program to build and test an new analytical instrument, a local electrode atom probe (LEAP). This instrument will use very high electric fields applied to a surface to field evaporate atoms and accelerate them toward an imaging detector. The atom type is determined by time-of-flight mass spectrometry for each atom. A three-dimensional image which is made up of the atom positions and identities is then reconstructed from the data. Unlike prior instruments of this genre, the LEAP will have the capability to obtain these images from planar samples. It will also be able to record the data orders of magnitude faster than previous instruments. This higher speed and planar specimen geometry will make the LEAP technique able to tackle new problems which have previously been out of reach. It is expected that this LEAP will be able to do many of the jobs that previously would have been done with a secondary ion mass spectrometer (SIMS) and it will do them with atomic-scale spatial resolution. The specimen geometry for this microscope is such that it is realistic to fabricate and analyze specimens from whole classes of materials which have been off-limits in the past. Semiconductors, insulators, thin film structures on planar substrates, and even microelectronic devices are examples. A couple of intractable problems in the microelectronics industry are specifically targeted in this project because of their technological and economic significance and because they will serve as prime illustrations of the power of the technique. Successful analysis of these materials problems is a goal of this program. The combination of these capabilities will produce a technological breakthrough in materials characterization. ***

该奖项为建立和测试一种新的分析仪器——局部电极原子探针（LEAP）的开发项目提供了部分支持。这种仪器将利用施加在物体表面的高电场来蒸发原子，并将它们加速到成像探测器。原子类型由每个原子的飞行时间质谱测定。然后根据这些数据重建由原子位置和身份组成的三维图像。与之前的同类仪器不同，LEAP将有能力从平面样本中获得这些图像。它记录数据的速度也将比以前的仪器快几个数量级。这种更高的速度和平面试样几何形状将使LEAP技术能够解决以前无法解决的新问题。预计LEAP将能够完成以前由次级离子质谱仪（SIMS）完成的许多工作，并且它将以原子尺度的空间分辨率完成这些工作。这种显微镜的标本几何形状使得它可以用过去禁止使用的各种材料制作和分析标本。半导体、绝缘体、平面衬底上的薄膜结构，甚至微电子器件都是例子。微电子工业中几个棘手的问题在这个项目中是特别针对的，因为它们的技术和经济意义，因为它们将成为该技术力量的主要例证。成功地分析这些材料问题是本课程的目标。这些能力的结合将在材料表征方面产生技术突破。＊＊＊