POWRE: The Missing Link: Gas-Phase Chemistry of Plasma CVD

POWRE：缺失的环节：等离子体 CVD 的气相化学

• 批准号: 9720491
• 负责人: Carmela Amato-Wierda
• 金额: $ 6.4万
• 依托单位: University of New Hampshire
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-11-01 至 2000-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9720491&HistoricalAwards=false
• 关键词: POWRE; Missing; Link; Gas; Phase

9720491 Amato-Wierda This project aims to introduce a complementary line of inquiry in the area of gas-phase chemistry of plasma enhanced chemical vapor deposition (PECVD) to the PI's research program through analysis of the gas-phase composition during PECVD by molecular beam mass spectrometry (MBMS). The gas-phase neutral, ion, and radical species, as well as their kinetics and mechanisms, will be correlated with process variables and final film properties. The project is co-supported by the Division of Materials Research, and the MPS OMA(Office of Multidisciplinary Activities). %%% This is a research enhancement grant made under the Professional Opportunities for Women in Research and Education (POWRE) program. The research will contribute basic materials science knowledge at a fundamental level of special relevance to the synthesis and processing of electronic materials. ***

9720491 Amato-Wierda该项目旨在通过分子束质谱（MBMS）分析PECVD过程中的气相成分，为PI的研究计划引入等离子体增强化学气相沉积（PECVD）气相化学领域的补充调查。气相中性，离子和自由基物种，以及它们的动力学和机制，将与工艺变量和最终的膜性能。该项目由材料研究部和MPS OMA（多学科活动办公室）共同支持。这是根据研究和教育领域女性专业机会（POWRE）方案提供的研究增强补助金。该研究将有助于在电子材料的合成和加工的特别相关的基础水平的基本材料科学知识。***