Collisional and Spectroscopic Studies of Low-Temperature Plasma Constituents
Collisional and Spectroscopic Studies of Low-Temperature Plasma Constituents
批准号:
9722438
负责人:
Kurt Becker
金额:
$27.12万
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1997
资助国家:
美国
项目状态:
已结题
起止时间:
1997-08-01 至 2001-07-31
中文摘要
点击翻译按钮获取中文摘要
英文摘要
This research program concentrates on studies of collision processes relevant to the physics and chemistry of low- temperature plasmas used in processing. Four different areas of emphasis are pursued: collisional and spectroscopic studies involving silicon-organic compounds; LIF studies of neutral ground-state dissociation fragments; electron collisions with C-60 and C-70; and modeling of plasma-wall interactions and wall recombination processes. The results of the work will contribute to the fundamental understanding of basic plasma processes as well as provide information necessary for the utilization of plasmas in processing applications.
期刊论文(0)
专著(0)
科研奖励(0)
会议论文
Collaborative Research: Proofing A Basic Systems Engineering Model Through Empirically-Based Cognitive Testing
-
批准号:1761774
-
项目类别:Standard Grant
-
资助金额:$23.66万
-
财政年份:2018
-
负责人:Kurt Becker
-
依托单位:
Collaborative Research: Quantifying Differences Between Professional Expert Engineers and Engineering Students Designing: Empirical Foundations for Improved Engineering Education
-
批准号:1463809
-
项目类别:Standard Grant
-
资助金额:$31.19万
-
财政年份:2015
-
负责人:Kurt Becker
-
依托单位:
GRADUATE RESEARCH FELLOWSHIP PROGRAM
-
批准号:1104522
-
项目类别:Fellowship Award
-
资助金额:$4.05万
-
财政年份:2010
-
负责人:Kurt Becker
-
依托单位:
Laboratories for Institute for Engineered Interfaces
-
批准号:0963137
-
项目类别:Standard Grant
-
资助金额:$300.0万
-
财政年份:2010
-
负责人:Kurt Becker
-
依托单位:
Exploring Engineering Design Knowing and Thinking as an Innovation in STEM Learning
-
批准号:0918621
-
项目类别:Standard Grant
-
资助金额:$44.69万
-
财政年份:2009
-
负责人:Kurt Becker
-
依托单位:
A National Symposium to Develop and Present a Case for the Establishment of Engineering Education Academic Programs (SEEAP)
-
批准号:0835997
-
项目类别:Standard Grant
-
资助金额:$0.0万
-
财政年份:2008
-
负责人:Kurt Becker
-
依托单位:
Communities of Effective Practice: A Professional Stem Development Model for Teachers of American Indian Students
-
批准号:0554472
-
项目类别:Continuing Grant
-
资助金额:$29.99万
-
财政年份:2006
-
负责人:Kurt Becker
-
依托单位:
Second International Workshop on Microplasmas (Student Support); October 6-8, 2004; Hoboken, NJ
-
批准号:0405801
-
项目类别:Standard Grant
-
资助金额:$0.75万
-
财政年份:2004
-
负责人:Kurt Becker
-
依托单位:
Collisional and Radiative Processes in High-Pressure Discharge Plasmas
-
批准号:9986692
-
项目类别:Continuing Grant
-
资助金额:$27.0万
-
财政年份:2000
-
负责人:Kurt Becker
-
依托单位:
Interaction of Electrons and Photons with Reactive Plasma Radicals
-
批准号:9401874
-
项目类别:Continuing Grant
-
资助金额:$25.08万
-
财政年份:1994
-
负责人:Kurt Becker
-
依托单位:
Electron-Photon Polarization Correlation Studies in the Heavy Noble Gases
-
批准号:9214729
-
项目类别:Continuing Grant
-
资助金额:$14.72万
-
财政年份:1992
-
负责人:Kurt Becker
-
依托单位:
Scientific Visit to Brazil to Plan Cooperative Research in Electron-Atom and Electron-Molecule Collisions
-
批准号:9024362
-
项目类别:Standard Grant
-
资助金额:$0.0万
-
财政年份:1991
-
负责人:Kurt Becker
-
依托单位:
Collision Cross Sections for Electron-Impact Dominated Processes in Etching Plasmas
-
批准号:9017211
-
项目类别:Continuing Grant
-
资助金额:$21.95万
-
财政年份:1991
-
负责人:Kurt Becker
-
依托单位:
5th International Symposium on Polarization and Correlation in Electronic and Atomic Collisions; Hoboken, New Jersey; August 2-3, 1989 (Physics)
-
批准号:8901594
-
项目类别:Standard Grant
-
资助金额:$0.3万
-
财政年份:1989
-
负责人:Kurt Becker
-
依托单位:
Engineering Research Equipment Grant: A Corrosion-Resistant Electron-Impact Fragment Spectrometer
-
批准号:8902405
-
项目类别:Standard Grant
-
资助金额:$5.08万
-
财政年份:1989
-
负责人:Kurt Becker
-
依托单位:
Coherence in Electron-Heavy Noble Gas Collisions (Physics)
-
批准号:8910360
-
项目类别:Continuing Grant
-
资助金额:$22.92万
-
财政年份:1989
-
负责人:Kurt Becker
-
依托单位:
Measurement of Polarization Correlations Following Excitation of Heavy Rare Gases by Electron Impact (Physics)
-
批准号:8819510
-
项目类别:Standard Grant
-
资助金额:$6.67万
-
财政年份:1988
-
负责人:Kurt Becker
-
依托单位:
Study of Atomic and Molecular Processes Associated with the Fragmentation of Etchant Gas Plasma Constituents
-
批准号:8896249
-
项目类别:Continuing Grant
-
资助金额:$5.26万
-
财政年份:1988
-
负责人:Kurt Becker
-
依托单位:
Study of Atomic and Molecular Processes Associated with the Fragmentation of Etchant Gas Plasma Constituents
-
批准号:8614513
-
项目类别:Continuing Grant
-
资助金额:$7.31万
-
财政年份:1987
-
负责人:Kurt Becker
-
依托单位:
Measurement of Polarization Correlations Following Excitation of Heavy Rare Gases by Electron Impact (Physics)
-
批准号:8517629
-
项目类别:Continuing Grant
-
资助金额:$12.93万
-
财政年份:1986
-
负责人:Kurt Becker
-
依托单位:
海外基金