Collisional and Spectroscopic Studies of Low-Temperature Plasma Constituents

低温等离子体成分的碰撞和光谱研究

• 批准号: 9722438
• 负责人: Kurt Becker
• 金额: $ 27.12万
• 依托单位: Stevens Institute of Technology
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1997
• 资助国家: 美国
• 起止时间: 1997-08-01 至 2001-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9722438&HistoricalAwards=false
• 关键词: Collisional; Spectroscopic; Studies; Low; Temperature

This research program concentrates on studies of collision processes relevant to the physics and chemistry of low- temperature plasmas used in processing. Four different areas of emphasis are pursued: collisional and spectroscopic studies involving silicon-organic compounds; LIF studies of neutral ground-state dissociation fragments; electron collisions with C-60 and C-70; and modeling of plasma-wall interactions and wall recombination processes. The results of the work will contribute to the fundamental understanding of basic plasma processes as well as provide information necessary for the utilization of plasmas in processing applications.

该研究计划集中于与加工中使用的低温等离子体的物理和化学相关的碰撞过程的研究。 四个不同的重点领域进行：碰撞和光谱研究涉及硅有机化合物; LIF研究中性基态解离碎片;电子碰撞与C-60和C-70;和建模等离子体壁相互作用和壁重组过程。 工作的结果将有助于基本等离子体工艺的基本理解，以及提供必要的信息，利用等离子体在加工应用。