Interaction of Electrons and Photons with Reactive Plasma Radicals

电子和光子与活性等离子体自由基的相互作用

• 批准号: 9401874
• 负责人: Kurt Becker
• 金额: $ 25.08万
• 依托单位: CUNY City College
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-06-15 至 1997-11-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9401874&HistoricalAwards=false
• 关键词: Interaction; Electrons; Photons; Reactive; Plasma

9401874 K. Becker Experimental investigations of collision cross sections of interest to low-temperature plasma processing are investigated. The emphasis is on reactive species containing F, Cl and Br atoms with the goal of producing data on excitation and dissociation by analysis of the optical spectra produced by electron impact on the parent molecules. The data is essential for characterizing and modeling reactive plasmas used in industrially important processes such as plasma etching.

9401874 K. Becker 对低温等离子体处理感兴趣的碰撞截面进行了实验研究。 重点是含有 F、Cl 和 Br 原子的活性物质，目的是通过分析电子撞击母体分子产生的光谱来产生激发和解离的数据。 这些数据对于表征和建模工业重要工艺（例如等离子体蚀刻）中使用的反应等离子体至关重要。