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Interaction of Electrons and Photons with Reactive Plasma Radicals

Interaction of Electrons and Photons with Reactive Plasma Radicals
电子和光子与活性等离子体自由基的相互作用
批准号:
9401874
负责人:
Kurt Becker
金额:
$25.08万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1994
资助国家:
美国
项目状态:
已结题
起止时间:
1994-06-15 至 1997-11-30

项目摘要

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中文摘要
翻译
9401874 K.Becker对低温等离子体处理中的碰撞截面进行了实验研究。重点放在含有F、Cl和Br原子的活性物种上,目的是通过分析电子与母体分子碰撞产生的光谱来产生关于激发和解离的数据。这些数据对于描述和模拟在工业上重要的过程中使用的反应等离子体是必不可少的,例如等离子体刻蚀。
英文摘要
9401874 K. Becker Experimental investigations of collision cross sections of interest to low-temperature plasma processing are investigated. The emphasis is on reactive species containing F, Cl and Br atoms with the goal of producing data on excitation and dissociation by analysis of the optical spectra produced by electron impact on the parent molecules. The data is essential for characterizing and modeling reactive plasmas used in industrially important processes such as plasma etching.
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Collaborative Research: Proofing A Basic Systems Engineering Model Through Empirically-Based Cognitive Testing
  • 批准号:
    1761774
  • 项目类别:
    Standard Grant
  • 资助金额:
    $23.66万
  • 财政年份:
    2018
  • 负责人:
    Kurt Becker
  • 依托单位:
Collaborative Research: Quantifying Differences Between Professional Expert Engineers and Engineering Students Designing: Empirical Foundations for Improved Engineering Education
  • 批准号:
    1463809
  • 项目类别:
    Standard Grant
  • 资助金额:
    $31.19万
  • 财政年份:
    2015
  • 负责人:
    Kurt Becker
  • 依托单位:
GRADUATE RESEARCH FELLOWSHIP PROGRAM
  • 批准号:
    1104522
  • 项目类别:
    Fellowship Award
  • 资助金额:
    $4.05万
  • 财政年份:
    2010
  • 负责人:
    Kurt Becker
  • 依托单位:
Laboratories for Institute for Engineered Interfaces
  • 批准号:
    0963137
  • 项目类别:
    Standard Grant
  • 资助金额:
    $300.0万
  • 财政年份:
    2010
  • 负责人:
    Kurt Becker
  • 依托单位:
海外基金