Periodic Structures in the Study and Control of Surface Microtopography and Lattice Strain

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9725082 Blakely This project utilizes periodic structures for fundamental studies of the dynamics of semiconductor surfaces, the production of stepfree substrates, and oxidation of high aspect-ratio nanostructures. The evolution of mesoscale structure will be studied in a context in which connection to the underlying physical mechanisms and appropriate theoretical approach to describing macroscopic structure evolution are addressed. Focus of the project is on fundamental understanding and control of surface structural defects, the kinetics of surface morphological changes, and the effect of morphology on lattice strain in the near-surface region. Initially most of the experiments will be done with silicon, but extension to other materials, Ge, C, GaAs and SiGe alloys will be considered. Major experimental methods for the structural and kinetic studies will be scanning tunneling and atomic force microscopy, low energy electron diffraction and microscopy and surface X-ray diffraction. Conventional nanofabrication methods of sample preparation will be complemented by novel techniques to create periodically patterned surfaces of very small periods. %%% The project addresses basic research issues in a topical area of materials science having high technological relevance. The research will contribute basic materials science knowledge at a fundamental level to important aspects of electronic/photonic devices. Experimental tools are now available to allow atomic level observation of elementary surface processes which when better understood will allow advances in both fundamental science and technology. The basic knowledge and understanding gained from the research is expected to contribute to improving the perform ance and stability of advanced devices and circuits by providing a fundamental understanding and a basis for designing and producing improved materials, and materials combinations. An important feature of the program is the integration of researc h and education through the training of students in a fundamentally and technologically significant area. ***