Periodic Structures in the Study and Control of Surface Microtopography and Lattice Strain

表面微形貌和晶格应变研究与控制中的周期结构

• 批准号: 9725082
• 负责人: John Blakely
• 金额: --
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Continuing grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-03-01 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9725082&HistoricalAwards=false
• 关键词: Periodic; Structures; Study; Control; Surface

9725082 Blakely This project utilizes periodic structures for fundamental studies of the dynamics of semiconductor surfaces, the production of stepfree substrates, and oxidation of high aspect-ratio nanostructures. The evolution of mesoscale structure will be studied in a context in which connection to the underlying physical mechanisms and appropriate theoretical approach to describing macroscopic structure evolution are addressed. Focus of the project is on fundamental understanding and control of surface structural defects, the kinetics of surface morphological changes, and the effect of morphology on lattice strain in the near-surface region. Initially most of the experiments will be done with silicon, but extension to other materials, Ge, C, GaAs and SiGe alloys will be considered. Major experimental methods for the structural and kinetic studies will be scanning tunneling and atomic force microscopy, low energy electron diffraction and microscopy and surface X-ray diffraction. Conventional nanofabrication methods of sample preparation will be complemented by novel techniques to create periodically patterned surfaces of very small periods. %%% The project addresses basic research issues in a topical area of materials science having high technological relevance. The research will contribute basic materials science knowledge at a fundamental level to important aspects of electronic/photonic devices. Experimental tools are now available to allow atomic level observation of elementary surface processes which when better understood will allow advances in both fundamental science and technology. The basic knowledge and understanding gained from the research is expected to contribute to improving the perform ance and stability of advanced devices and circuits by providing a fundamental understanding and a basis for designing and producing improved materials, and materials combinations. An important feature of the program is the integration of researc h and education through the training of students in a fundamentally and technologically significant area. ***

9725082布莱克利该项目利用周期性结构进行半导体表面动力学的基础研究、无台阶衬底的生产以及高纵横比纳米结构的氧化。中尺度结构的演变将在与潜在物理机制的联系和描述宏观结构演变的适当理论方法的背景下被研究。该项目的重点是对表面结构缺陷的基本了解和控制，表面形态变化的动力学，以及形态对近表面区域晶格应变的影响。最初，大多数实验将用硅进行，但将考虑将其推广到其他材料，如Ge、C、GaAs和SiGe合金。结构和动力学研究的主要实验方法将是扫描隧道和原子力显微镜、低能电子衍射和显微镜以及表面X射线衍射。传统的纳米样品制备方法将得到新技术的补充，以创建非常小周期的周期性图案化表面。%该项目致力于具有高度技术相关性的材料科学主题领域的基础研究问题。这项研究将在基础水平上为电子/光子器件的重要方面贡献基本的材料科学知识。现在可以使用实验工具对基本的表面过程进行原子水平的观察，如果更好地理解这一点，就会促进基础科学和技术的进步。从研究中获得的基本知识和理解将有助于提高先进器件和电路的性能和稳定性，为设计和生产改进的材料和材料组合提供基本的理解和基础。该计划的一个重要特点是通过在一个具有重要基础和技术意义的领域对学生进行培训，将研究和教育结合起来。***