Thermodynamics of Nanostructures and Buried Silicide Interfaces using Scanning Nanocalorimetry

使用扫描纳米量热法研究纳米结构和埋入硅化物界面的热力学

• 批准号: 9726458
• 负责人: Leslie Allen
• 金额: $ 30.77万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-03-15 至 2002-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9726458&HistoricalAwards=false
• 关键词: Thermodynamics; Nanostructures; Buried; Silicide; Interfaces

9726458 Allen This project aims to investigate a variety of basic materials issues in thin films and at interfaces, e.g., coalescence during initial stages of film growth, silicide formation with restricted dimensions, and dimensional stability and reflow of aluminum nanostructures through the use of a recently developed nanocalorimetry technique. The proposed research seeks new insights into effects of particle/cluster/island size and of surfaces in stability and kinetics of materials, and to reveal new information about behavior of materials at nanometer length scales. %%% The project addresses basic research issues in a topical area of materials science having high technological relevance. The research will contribute basic materials science knowledge at a fundamental level to important aspects of electronic/photonic materials. The fundamental knowledge and understanding gained from the research is expected to contribute to improving the performance and stability of advanced devices and circuits by providing a fundamental understanding and a basis for designing and producing improved materials, and materials combinations. An important feature of the program is the integration of research and education through the training of students in a fundamentally and technologically significant area. ***

9726458艾伦 该项目旨在研究薄膜和界面处的各种基本材料问题，例如，在膜生长的初始阶段期间的聚结、具有受限尺寸的硅化物形成、以及通过使用最近开发的纳米量热技术的铝纳米结构的尺寸稳定性和回流。 拟议的研究寻求新的见解颗粒/集群/岛的大小和表面的稳定性和动力学的材料的影响，并揭示新的信息，在纳米长度尺度上的材料的行为。 该项目解决了具有高技术相关性的材料科学专题领域的基础研究问题。 该研究将为电子/光子材料的重要方面提供基础材料科学知识。 从研究中获得的基础知识和理解有望通过提供设计和生产改进材料和材料组合的基本理解和基础，有助于提高先进器件和电路的性能和稳定性。 该计划的一个重要特点是通过在一个基本和技术上重要的领域对学生进行培训来整合研究和教育。 ***