High-Speed, Monolayer Sensitivity Scanning Microcalorimetry for Solid-Solid Interface and Surface Studies

用于固-固界面和表面研究的高速单层灵敏度扫描微量热法

• 批准号: 9419604
• 负责人: Leslie Allen
• 金额: $ 5万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-11-15 至 1995-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9419604&HistoricalAwards=false
• 关键词: Speed; Monolayer; Sensitivity; Scanning; Microcalorimetry

9419604 Allen Research will be carried out to explore and study a new approach to scanning calorimetry. The proposed approach is potentially a very powerful method for directly obtaining quantitative values for small enthalpy of reactions at interfaces, surfaces and near surface regions. We expect to achieve sensitivity equivalent to the enthalpy of submonolayer desorption, to demonstrate the utility of the method for the measurement of extremely small amounts of heat generated during solid/solid reactions and surface processes as well as low enthalpy of internal microcrystalline processes. We will measure the kinetics of interface reactions such as the nucleation of silicides at buried interfaces, and begin a study of near surface processes, such as point defect annihilation and coalescence of vacancies in silicon following ion implantation. %%% The primary goal of this program is to develop a high sensitivity microcalorimeter based on modern thin film techniques, and to demonstrate its useful in gaining fundamental materials science information on surface science phenomena such as the enthalpy of surface reconstruction, phase transformations, and individual microscopic properties of surface chemistry processes such as the decomposition of adsorbed species during atomic layer epitaxy. An important feature of the program is the training of graduate and undergraduate students in a fundamentally and technologically significant area of materials and processing research. This research will contribute to improving the general perform ance of advanced devices and integrated circuits used in computing, information processing, and tele communica tions. ***

9419604将开展艾伦研究，探索和研究扫描量热法的新方法。 所提出的方法是一个潜在的非常强大的方法，直接获得定量的小焓的反应在界面，表面和近表面区域的值。 我们期望实现相当于亚单层解吸焓的灵敏度，以证明该方法用于测量固体/固体反应和表面过程以及内部微晶过程的低焓过程中产生的极少量热量的实用性。 我们将测量界面反应的动力学，如硅化物在掩埋界面的成核，并开始近表面过程的研究，如点缺陷湮没和硅中的空位合并后离子注入。该计划的主要目标是开发一种基于现代薄膜技术的高灵敏度微量热计，并证明其在获得表面科学现象的基本材料科学信息方面的有用性，例如表面重建的焓，相变和表面化学过程的个体微观特性，例如原子层外延过程中吸附物种的分解。 该计划的一个重要特点是在材料和加工研究的基本和技术重要领域培养研究生和本科生。 这项研究将有助于提高先进器件和集成电路在计算、信息处理和电信领域的综合性能。 ***