Acquisition of an Imaging Filter for an Analytical Electron Microscope

分析电子显微镜成像滤光片的采集

• 批准号: 9802839
• 负责人: Mehmet Sarikaya
• 金额: $ 10万
• 依托单位: University of Washington
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-08-15 至 1999-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9802839&HistoricalAwards=false
• 关键词: Acquisition; Imaging; Filter; Analytical; Electron

9802839SarikayaThis award provides partial support to acquire a post-column imaging filter, to be interfaced to an ultra-high-resolution 200 keV analytical transmission electron microscope. The resultant high-resolution, energy-filtering transmission electron microscope (EFTEM) will be employed in a wide range of multidisciplinary research and materials science projects at the University of Washington.The instrument will be used to: (i) map the distribution of most elements in thin samples and probe the sample's chemistry with a spatial resolution of 0.5-2 nm in about one minute for a 512 x 512 pixel map; (ii) digitally record energy-filtered high resolution EM images and diffraction patterns with precision that will revolutionize our ability to analyze materials quantitatively; and (iii) acquire data by electron energy loss spectroscopy and associated techniques, such as energy loss near-edge and extended edge fine structure analyses (ELNES and EXELFS), with unprecedented sensitivity and signal-to-noise ratio. Owing to the high-quality objective lens of the microscope, the obtainable spatial resolution in elemental maps will be about 0.5 nm, i.e. significantly better than the resolution that can be achieved in most energy-filtering systems. The wide range of capabilities made possible by the instrument will revolutionize the way structures can be analyzed in many areas of materials science, condensed matter physics, chemistry and biology at the University of Washington and in the whole Pacific Nrorthwestern geographical region. The instrument will be employed extensively in courses on materials science characterization at UW, and it will also serve to deepen the extensive collaborations we have with local and national companies and various government and university laboratories.Among the materials to be investigated are: (i) Biomimetic and biological materials: interfaces and problems related to templating for inorganic growth; (ii) Microelectronic devices: interfaces, diffusion, oxide compositions, dielectric properties, and dopant distrubutions; (iii) Ferroelectrics and dielectrics: local structures/properties, and compositional variations; (iv) Ceramic composites and glasses: structure and composition profiles, spinodal decomposition in glass matrices.The nano-scale composition and chemistry in materials research are the keys to understanding and controlling the macroscopic properties of materials. All the materials to be studied with the instrument are of very high scientific and industrial importance. The instrument will allow the materials to be imaged at atomic resolution, their composition to be studied at nm-level resolution, and their bonding and electronic properties to be investigated. Our research will also focus on advancing the capabilities of electron energy loss spectroscopy (EELS) towards reliable single atom detection. In particular, detection limits will be studied aiming to extend the attainable minimum detectable mass fraction into the parts per million range. The improved technique will be applied in areas such as dopant detection in semiconductors and ionic concentrations in biological materials. Our previously developed techniques in the ELNES and EXELFS areas will be made much more powerful by the excellent probe-forming capabilities of the 002B, and we will apply them to a braod range of advanced materials. We also plan to develop spectrum imaging with the new instrument and optimize it so that it can produce reliable elemental maps of elements present in concentrations of less than 1 part per thousand.%%%***

9802839 Sarikaya该奖项提供部分支持，以获得柱后成像滤光片，用于连接到超高分辨率200 keV分析透射电子显微镜。 由此产生的高分辨率，能量过滤透射电子显微镜（EFTEM）将用于华盛顿大学的多学科研究和材料科学项目。该仪器将用于：（i）绘制薄样品中大多数元素的分布图，并探测样品的化学性质，空间分辨率为0.5-（ii）以数字方式精确记录能量过滤的高分辨率EM图像和衍射图案，这将彻底改变我们定量分析材料的能力;以及（iii）通过电子能量损失谱和相关技术（例如能量损失近边缘和扩展边缘精细结构分析）获取数据（ELNES和EXELFS），具有前所未有的灵敏度和信噪比。 由于显微镜的高质量物镜透镜，元素图中可获得的空间分辨率将为约0.5 nm，即显著优于在大多数能量过滤系统中可实现的分辨率。 该仪器的广泛功能将彻底改变华盛顿大学和整个太平洋西北地理区域的材料科学、凝聚态物理、化学和生物学等许多领域的结构分析方式。 该仪器将被广泛应用于材料科学表征课程在华盛顿大学，它也将有助于加深我们与当地和国家公司和各种政府和大学实验室的广泛合作。其中材料将被调查：（i）仿生和生物材料：界面和问题有关的模板无机生长;（ii）微电子器件：界面、扩散、氧化物成分、介电性能和掺杂剂分布;（iii）铁电体和铁电体：局部结构/性能和成分变化;（iv）陶瓷复合材料和玻璃：结构和组成概况，在玻璃矩阵的调幅分解。纳米-材料研究中的尺度组成和化学是理解和控制材料宏观性能的关键。 所有要用仪器研究的材料都具有非常高的科学和工业重要性。 该仪器将允许材料以原子分辨率成像，以纳米级分辨率研究其组成，并研究其键合和电子特性。 我们的研究还将侧重于推进电子能量损失谱（EELS）的能力，以实现可靠的单原子检测。 特别是，将研究检测极限，目的是将可达到的最低可检测质量分数扩展到百万分之一的范围。 改进后的技术将应用于半导体中的掺杂剂检测和生物材料中的离子浓度等领域。 我们先前在ELNES和EXELFS领域开发的技术将通过002 B出色的探针成形能力变得更加强大，我们将把它们应用于一系列先进材料。 我们还计划使用新仪器开发光谱成像并对其进行优化，以便它能够生成浓度低于千分之一的元素的可靠元素图。%*