Assembly of Functionally-enhanced MEMs by Laser Liftoff and Transfer of Epitaxial Piezoelectric Thin Films

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Abstract EEC-9812906SandsU CAL Berkeley: This is an Exploratory Research Project to augment the Industry/University Cooperative Reseach Center for Sensors and Actuators.The research exploits the recent development of a novel laser liftoff process for the integration of functional thin-film materials and heterostructures with Micro-ElectroMechanical Systems (MEMS) assembled onto virtually any substrate, enabling separate optimized processing of two or disparate materials systems prior to assembly. This process is suited to many functional thin film materials and heterostructures .The salient feature of the liftoff process is the nanosecond-timescale decomposition of a thin interfacial layer through the transparent substrate. The process is very rapid, can be performed in the laboratory ambient, no special sacrificial layer is required, and the peak temperature at the film surface is substantially below the decomposition temperature, and the selected-area liftoff is readily achieved.