Assembly of Functionally-enhanced MEMs by Laser Liftoff and Transfer of Epitaxial Piezoelectric Thin Films

通过激光剥离和外延压电薄膜转移组装功能增强型 MEM

• 批准号: 9812906
• 负责人: Timothy Sands
• 金额: $ 10万
• 依托单位: University of California-Berkeley
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-01 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9812906&HistoricalAwards=false
• 关键词: Assembly; Functionally; enhanced; MEMs; Laser

Abstract EEC-9812906SandsU CAL Berkeley: This is an Exploratory Research Project to augment the Industry/University Cooperative Reseach Center for Sensors and Actuators.The research exploits the recent development of a novel laser liftoff process for the integration of functional thin-film materials and heterostructures with Micro-ElectroMechanical Systems (MEMS) assembled onto virtually any substrate, enabling separate optimized processing of two or disparate materials systems prior to assembly. This process is suited to many functional thin film materials and heterostructures .The salient feature of the liftoff process is the nanosecond-timescale decomposition of a thin interfacial layer through the transparent substrate. The process is very rapid, can be performed in the laboratory ambient, no special sacrificial layer is required, and the peak temperature at the film surface is substantially below the decomposition temperature, and the selected-area liftoff is readily achieved.

摘要EEC-9812906SandsU CAL Berkeley：这是一个探索性研究项目，旨在加强工业/大学合作研究中心的传感器和执行器。这项研究利用了一种新的激光发射工艺，用于将功能薄膜材料和异质结构与安装在几乎任何衬底上的微型机电系统(MEMS)集成在一起，使两种或不同材料系统在组装之前能够进行单独的优化处理。这一过程适用于许多功能薄膜材料和异质结构。发射过程的显著特征是通过透明衬底的薄界面层的纳秒级分解。该过程非常迅速，可以在实验室环境中进行，不需要特殊的牺牲层，并且薄膜表面的峰值温度大大低于分解温度，并且很容易实现选定区域的发射。