XYZ-On-A-Chip: Integration of Dissimilar Materials by Bonding and Thin-Film Transfer: Application to Integrated Optical Microfluidic Systems

这笔赠款为旨在通过密切组装不同类别的材料来增强综合生物分析微系统功能的研究提供资金，每种材料都被选择来提供特定的功能。每种材料组件将在特定材料的最佳条件下通过薄膜沉积工艺在单独的衬底上制备。薄膜组件，包括用于蓝光和紫外光发射的氮化镓异质结构，用于机械驱动的压电多层膜，以及用于光学元件和生物兼容涂层的聚合物，然后将通过键合和层转移结合到微机械玻璃、聚合物和硅衬底上。利用脉冲激光和离子照射对材料进行空间选择性改性的薄膜转移方法将被采用并模拟，目标是最大限度地减少待集成材料(通常是聚合物)中最不坚固的材料的热和机械退化。在该项目过程中开发的材料集成和微制造方法将针对基于荧光检测的全集成光学微流控生物分析设备的演示。这些设备结合了荧光激发源、孔径致动器机构、微流控通道、滤光器和荧光检测器，所有这些都在大约一立方米(米)的体积内。如果成功，该项目将开发必要的材料集成工艺，以利用直接与微通道衬底集成的多颜色荧光检测设备阵列来制造复杂、低成本和便携式的生物检测微系统。光学激励和检测系统的直接集成消除了对体积庞大的激光器、滤光片和光电探测器的需要。此外，沿着微通道集成这些设备的密集线性阵列的潜力可以使快速的单分子分析在遗传学和病原体检测中应用。

This grant provides funding for research aimed at enhancing the functionality of integrated bioanalytical microsystems through the intimate assembly of disparate classes of materials, each chosen to provide a specific function. Each materials subassembly will be prepared on a separate substrate by thin-film deposition processes under optimal conditions for that particular material. Thin-film subassemblies, including gallium nitride heterostructures for blue and ultraviolet light emission, piezoelectric multilayers for mechanical actuation, and polymers for optical components and bio-compatible coatings, will then be combined by bonding and layer-transfer to micromachined glass, polymer and silicon substrates. Film transfer methods utilizing spatially selective modification of materials by pulsed laser and ion irradiation will be employed and modeled with the goal of minimizing thermal and mechanical degradation of the least robust of the materials to be integrated (typically polymers). The materials integration and microtabrication methods developed during the course of this project will be targeted toward the demonstration of fully integrated optical microfluidic bioanalyticai devices based on fluorescence detection. These devices combine the fluorescence excitation source, the aperture actuator mechanism, the microfluidic channel, the optical filter, and the fluorescence detector, all within a volume of approximately a cubic mill (meter).If successful, this project will develop the materials integration processes necessary to fabricate complex, low-cost and portable bioassay microsystems utilizing multicolor arrays of fluorescence detection devices integrated directly with microchannel substrates. The direct integration of the optical excitation and detection system eliminates the need for bulky lasers, optical filters, and photodetectors. Furthermore, the potential for integrating dense linear arrays of these devices along microchannels could enable rapid, single-molecule analysis for applications in genetics and pathogen detection.