SBIR Phase I: An Advanced Computational Simulation Tool for Metalorganic Vapor Phase Epitaxy of Compound III-V Layers in Industrial Reactors

9861296这个小型企业创新研究第一阶段项目将把先进的辐射和化学模型纳入商业计算流体动力学程序，目的是开发一个商业模拟工具，利用金属有机气相外延(MOVPE)优化化合物III V层的生长。该代码将在工业反应堆上进行广泛的测试和验证。化合物半导体材料在异质衬底上的异质外延是蓝光到紫外光波段的光电子学、红外波段的非线性光学、功率器件和集成传感器器件的关键技术。通过对MOVPE工艺的适当控制，所提出的模型将成为展示无缺陷异质外延生长的一种可行技术。

9861296 This Small Business Innovation Research Phase I project will incorporate advanced radiation and chemistry models into a commercial computational fluid dynamics code for the purpose of developing a commercial simulation tool for optimizing the growth of compound III V Layers using Metalorganic Vapor Phase Epitaxy (MOVPE). The code will be extensively tested and validated for industrial reactors. Heteroepitaxy of compound semiconductor materials on heterogeneous substrates is a vital technology for optoelectronics in the blue to ultra violet wavelength region and non linear optics in the infra red region and power devices and integrated sensor devices. The proposed model will be an enabling technology in demonstrating defect free heteroepitaxial growth by facilitating appropriate control of the MOVPE process.