Acquisition of an Apparatus for Precision Fabrication of Nanostructures and Nanoclusters for Chemistry, Materials Science, and Physics Research

采购用于化学、材料科学和物理研究的纳米结构和纳米团簇精密制造设备

• 批准号: 9871234
• 负责人: Leonard Feldman
• 金额: $ 56.6万
• 依托单位: Vanderbilt University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1998
• 资助国家: 美国
• 起止时间: 1998-09-01 至 2002-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9871234&HistoricalAwards=false
• 关键词: Acquisition; Apparatus; Precision; Fabrication; Nanostructures

9871234FeldmanNanostructure science and technology embodies the art and science of fabricating 1-100 nm scale structures in order to study their materials properties. University research in this area drives the scientific frontier and trains students for the ultrasmall-scale technologies envisioned for the future. Funded by the Major Research Instrumentation program, the PIs will acquire and assemble a unique system comprising a finely-focused ion beam (FIB) coupled by a vacuum transfer line to a pulsed-laser deposition (PLD) apparatus. This system will be used to produce nanostructures and nanostructure devices with extremely high precision in an entirely new way, producing nanoclusters of extraordinary uniformity and extremely well determined spatial periodicity. PLD complements the FIB system as an extraordinarily flexible thin-film synthesis tool, widely used to synthesize epitaxial films of high-temperature superconductors, ferroelectrics, semiconductors and complex optical materials, as well as multilayer device structures. The coupled system gives us the critical capability of producing three dimensional arrays, unusual and uncontaminated substrates, and "capped" implanted structures for subsequent processing and characterization. This combination of equipment also enables the realization of advanced device structures in a variety of forefront technologies and will yield unique opportunities for interdisciplinary research of substantial breadth and depth. %%%This instrument combination, acquired with funds from the National Science Foundation's Major Research Instrumentation program, will serve a Vanderbilt goal of interdisciplinary research, by bringing together physicists, chemists, materials scientists, mechanical engineers, and electrical engineers. The collaborators include scientists from nearby Belmont and Fisk (a minority institution) Universities, and the University of Tennessee; Oak Ridge National Laboratory (ORNL), and the Danish Microelectronics Center (MIC). ORNL and the MIC have agreed to be major supporters of the program through contributed expertise in ion beam science (ORNL), pulsed laser deposition (ORNL), and optical device fabrication (MIC). The instrumentation It will be the nucleus of a new research and educational enterprise in middle Tennessee, involving minority-based universities and primarily-undergraduate colleges. It will also be a catalyst for new undergraduate research programs, and opportunities for Ph.D. matriculation at non-Ph.D. granting schools.***

9871234 Feldman纳米结构科学和技术体现了制造1-100纳米尺度结构的艺术和科学，以研究它们的材料特性。 大学在这一领域的研究推动了科学前沿，并为未来设想的超小型技术培训学生。 在主要研究仪器计划的资助下，PI将获取并组装一个独特的系统，该系统包括通过真空传输线耦合到脉冲激光沉积（PLD）设备的细聚焦离子束（FIB）。 该系统将用于以一种全新的方式生产具有极高精度的纳米结构和纳米结构设备，生产具有非凡均匀性和极好确定的空间周期性的纳米团簇。 PLD作为一种非常灵活的薄膜合成工具补充了FIB系统，广泛用于合成高温超导体、铁电体、半导体和复杂光学材料的外延膜，以及多层器件结构。 耦合系统给我们的关键能力，生产三维阵列，不寻常的和未污染的基板，和“盖帽”植入结构的后续处理和表征。 这种设备组合还可以在各种前沿技术中实现先进的器件结构，并将为跨学科研究提供独特的机会。%这个仪器组合，从国家科学基金会的主要研究仪器计划的资金收购，将服务于跨学科研究的范德比尔特的目标，汇集物理学家，化学家，材料科学家，机械工程师和电气工程师。 合作者包括来自附近的贝尔蒙特和菲斯克（少数民族机构）大学，田纳西大学，橡树岭国家实验室（ORNL）和丹麦微电子中心（MIC）的科学家。 ORNL和MIC已同意通过贡献离子束科学（ORNL），脉冲激光沉积（ORNL）和光学器件制造（MIC）的专业知识成为该计划的主要支持者。 它将成为田纳西州中部一个新的研究和教育企业的核心，涉及少数民族大学和初级本科院校。 它也将成为新的本科生研究项目的催化剂，并为博士生提供机会。非博士生入学* **