Acquisition of an Apparatus for Precision Fabrication of Nanostructures and Nanoclusters for Chemistry, Materials Science, and Physics Research

9871234 feldman纳米结构科学与技术体现了制造1-100纳米尺度结构以研究其材料性能的艺术和科学。大学在这一领域的研究推动了科学前沿，并为未来设想的超小规模技术培养了学生。在主要研究仪器项目的资助下，pi将获得并组装一个独特的系统，该系统包括通过真空传输线耦合到脉冲激光沉积（PLD）设备的精细聚焦离子束（FIB）。该系统将以一种全新的方式以极高的精度生产纳米结构和纳米结构器件，生产出具有非凡均匀性和极好确定的空间周期性的纳米团簇。PLD作为FIB系统的补充，是一种非常灵活的薄膜合成工具，广泛用于合成高温超导体、铁电体、半导体和复杂光学材料的外延膜，以及多层器件结构。耦合系统为我们提供了生产三维阵列的关键能力，不寻常的和未受污染的衬底，以及用于后续处理和表征的“封顶”植入结构。这种设备的组合也使各种前沿技术的先进设备结构得以实现，并将为广泛和深入的跨学科研究提供独特的机会。该仪器组合由美国国家科学基金会主要研究仪器项目提供资金，将通过汇集物理学家、化学家、材料科学家、机械工程师和电气工程师，为范德比尔特大学的跨学科研究目标服务。合作者包括来自附近贝尔蒙特和菲斯克大学（一个少数族裔机构）和田纳西大学的科学家；橡树岭国家实验室（ORNL）和丹麦微电子中心（MIC）。ORNL和MIC已经同意通过在离子束科学（ORNL）、脉冲激光沉积（ORNL）和光学器件制造（MIC）方面贡献专业知识，成为该计划的主要支持者。它将成为田纳西州中部一个新的研究和教育事业的核心，涉及少数民族大学和初级本科学院。它还将成为新的本科研究项目的催化剂，并为非博士学位的博士入学提供机会。授予学校。* * *

9871234FeldmanNanostructure science and technology embodies the art and science of fabricating 1-100 nm scale structures in order to study their materials properties. University research in this area drives the scientific frontier and trains students for the ultrasmall-scale technologies envisioned for the future. Funded by the Major Research Instrumentation program, the PIs will acquire and assemble a unique system comprising a finely-focused ion beam (FIB) coupled by a vacuum transfer line to a pulsed-laser deposition (PLD) apparatus. This system will be used to produce nanostructures and nanostructure devices with extremely high precision in an entirely new way, producing nanoclusters of extraordinary uniformity and extremely well determined spatial periodicity. PLD complements the FIB system as an extraordinarily flexible thin-film synthesis tool, widely used to synthesize epitaxial films of high-temperature superconductors, ferroelectrics, semiconductors and complex optical materials, as well as multilayer device structures. The coupled system gives us the critical capability of producing three dimensional arrays, unusual and uncontaminated substrates, and "capped" implanted structures for subsequent processing and characterization. This combination of equipment also enables the realization of advanced device structures in a variety of forefront technologies and will yield unique opportunities for interdisciplinary research of substantial breadth and depth. %%%This instrument combination, acquired with funds from the National Science Foundation's Major Research Instrumentation program, will serve a Vanderbilt goal of interdisciplinary research, by bringing together physicists, chemists, materials scientists, mechanical engineers, and electrical engineers. The collaborators include scientists from nearby Belmont and Fisk (a minority institution) Universities, and the University of Tennessee; Oak Ridge National Laboratory (ORNL), and the Danish Microelectronics Center (MIC). ORNL and the MIC have agreed to be major supporters of the program through contributed expertise in ion beam science (ORNL), pulsed laser deposition (ORNL), and optical device fabrication (MIC). The instrumentation It will be the nucleus of a new research and educational enterprise in middle Tennessee, involving minority-based universities and primarily-undergraduate colleges. It will also be a catalyst for new undergraduate research programs, and opportunities for Ph.D. matriculation at non-Ph.D. granting schools.***