MRI: The Acquisition of an Electron Beam Lithography System

MRI：电子束光刻系统的获取

• 批准号: 0521292
• 负责人: Leonard Feldman
• 金额: --
• 依托单位: Vanderbilt University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0521292&HistoricalAwards=false
• 关键词: MRI; Acquisition; Electron; Beam; Lithography

Nanoscale science and engineering requires the fabrication of materials with dimensions of 1-100nm (~4 to 400 atoms). Electron beam lithography is the tool with the highest resolution, most able to cover the nano-scale range. This proposal establishes an electron beam lithography laboratory to propel a variety of nano-scale projects as diverse as DNA sequencing with ~2 nm channels to studies of solid-state phase transitions in extremely small solids. The proposed acquisition occurs within an increasingly rich nanoscale science and engineering environment created with substantial peer-reviewed Federal funds and internal funds from Vanderbilt University. This acquisition will open to Vanderbilt and other nearby universities (including a special arrangement with Fisk University), a first state of the art facility for nanolithography in Middle Tennessee. The participation of underrepresented groups will be enhanced by the close cooperation with faculty and students from Fisk University. Many of the Vanderbilt co-PIs have established research collaborations with Fisk. We expect to train numerous students able to advance the scientific and technological forefront of nano-scale science and engineering. Many of these students are part of the Vanderbilt-Fisk IGERT, focused on the theme of nanoscale materials science. The impact extends from educational opportunities in post-doctoral, graduates and undergraduates training afforded the graduate students to potential research breakthroughs in nanoscale materials science to technological applications that impact society. This proposal establishes a state of the art laboratory for precise fabrication of nanometer-scale structures that are 1,000 times smaller than the diameter of a human hair. These include tiny fluidic channels and sensors, very small optical switches, and devices for observing and controlling single cells. The system will be housed in a state of the art clean room fabrication facility representing a multi-million dollar investment of Vanderbilt University funds, designed specifically to facilitate research in nanoscale materials science. This facility will accommodate senior researchers, postdoctoral scholars, graduate and undergraduate students in an interdisciplinary environment organized around five fully equipped fabrication laboratories. A unique opportunity is created by the fact that the system will be installed in the same suite occupied by earlier instrumentation partly funded in 2001, thus completing a unique capability in the fabrication and optical characterization of small material structures.

纳米科学和工程需要制造尺寸为1- 100 nm（约4至400个原子）的材料。电子束光刻是目前分辨率最高、最能覆盖纳米尺度范围的光刻工具。该提案建立了一个电子束光刻实验室，以推动各种纳米级项目，如具有~2 nm通道的DNA测序，以研究极小固体中的固态相变。 拟议的收购发生在一个日益丰富的纳米科学和工程环境中，该环境由大量同行评审的联邦基金和范德比尔特大学的内部基金创建。此次收购将开放给范德比尔特和其他附近的大学（包括与菲斯克大学的特殊安排），这是田纳西州中部第一个最先进的纳米光刻设施。代表性不足的群体的参与将通过与菲斯克大学的教师和学生的密切合作得到加强。许多范德比尔特的合作PI都与菲斯克建立了研究合作关系。我们期望培养出众多能够推进纳米科学与工程科学技术前沿的学生。其中许多学生是范德比尔特-菲斯克IGERT的一部分，专注于纳米材料科学的主题。其影响从博士后、研究生和本科生培训的教育机会，到纳米材料科学的潜在研究突破，再到影响社会的技术应用。该提案建立了一个最先进的实验室，用于精确制造比人类头发直径小1,000倍的纳米级结构。这些包括微小的流体通道和传感器，非常小的光学开关，以及用于观察和控制单细胞的设备。该系统将被安置在一个最先进的洁净室制造设施，代表了范德比尔特大学基金的数百万美元的投资，专门设计用于促进纳米材料科学的研究。该设施将容纳高级研究人员，博士后学者，研究生和本科生在一个跨学科的环境组织周围五个设备齐全的制造实验室。该系统将安装在2001年部分供资的早期仪器所使用的同一套设备中，从而完成小型材料结构的制造和光学特性鉴定的独特能力，这一事实创造了一个独特的机会。