CAREER: Deformation Mechanisms in Thin Metal Films

9875119 baker这项职业补助金探索了在非常小的体积中出现的特殊机械性能，并将其与材料机械性能领域的现代教育计划相结合。研究的重点是金属薄膜在衬底上的变形机理。现在人们认识到，这种薄膜的力学行为可能与同种金属的散装形式大不相同。机械性能和位错的行为在基片上的金属薄膜通过一个独特的努力组合详细检查。应力测量采用独特的超高真空溅射沉积结合衬底曲率测量系统进行。利用透射电子显微镜和x射线衍射方法进行了先进的微观结构表征。采用有限元和离散位错动力学方法模拟了材料的力学行为和微观结构。通过比较这些努力的结果，可以详细了解变形的微观结构和尺寸限制如何导致独特的薄膜行为。教育部分将机械性能的现代观点整合到康奈尔材料课程中，为学术界和工业界的个人提供有关小尺寸机械性能的专业知识。机械性能方面的三门课程计划：本科生的概论课程，高水平的研究生课程，以及研究生阶段的专门课程，侧重于小尺寸机械性能的各个方面。有兴趣的外部学习者有机会通过一系列教程和远程学习者的电子课程获得有关小尺寸机械性能的最新信息。对位错相互作用和位错行为在薄膜/衬底和薄膜/钝化界面附近的详细研究对于理解块体行为是重要的。由于基板上的金属薄膜是一系列高技术应用的关键要素，因此研究应产生可立即用于工业的知识，特别是在了解和提高微电子、微机械和光学装置以及涂层的可靠性方面。***9875119 baker这项职业补助金探索了在非常小的体积中出现的特殊机械性能，并将其与材料机械性能领域的现代教育计划相结合。研究的重点是金属薄膜在衬底上的变形机理。现在人们认识到，这种薄膜的力学行为可能与同种金属的散装形式大不相同。机械性能和位错的行为在基片上的金属薄膜通过一个独特的努力组合详细检查。应力测量采用独特的超高真空溅射沉积结合衬底曲率测量系统进行。利用透射电子显微镜和x射线衍射方法进行了先进的微观结构表征。采用有限元和离散位错动力学方法模拟了材料的力学行为和微观结构。通过比较这些努力的结果，可以详细了解变形的微观结构和尺寸限制如何导致独特的薄膜行为。教育部分将机械性能的现代观点整合到康奈尔材料课程中，为学术界和工业界的个人提供有关小尺寸机械性能的专业知识。机械性能方面的三门课程计划：本科生的概论课程，高水平的研究生课程，以及研究生阶段的专门课程，侧重于小尺寸机械性能的各个方面。有兴趣的外部学习者有机会通过一系列教程和远程学习者的电子课程获得有关小尺寸机械性能的最新信息。对位错相互作用和位错行为在薄膜/衬底和薄膜/钝化界面附近的详细研究对于理解块体行为是重要的。由于基板上的金属薄膜是一系列高技术应用的关键要素，因此研究应产生可立即用于工业的知识，特别是在了解和提高微电子、微机械和光学装置以及涂层的可靠性方面。＊＊＊

9875119BakerThis CAREER grant explores the special mechanical properties that arise in very small volumes and integrates it with a modern education program in the area of mechanical properties of materials. The research focuses on deformation mechanisms in thin metal films on substrates. It is now recognized that the mechanical behavior of such films may be very different from that of the same metals in bulk form. The mechanical properties and the behavior of dislocations in thin metal films on substrates are examined in detail via a unique combination of efforts. Stress measurements are conducted using a unique ultra-high-vacuum sputter deposition combined with a substrate curvature measurement system. Advanced microstructural characterization is carried out using transmission electron microscopy and x-ray diffraction methods. Mechanical behavior and microstructure are simulated using finite element and discrete dislocation dynamics methods. By comparing the results of these efforts, detailed knowledge is generated on how microstructural and dimensional constraints on deformation lead to unique film behavior. The educational portion integrates a modern view of mechanical properties into the Cornell materials curriculum, bringing specialized knowledge regarding mechanical properties in small dimensions to individuals in both academe and industry. Three courses in mechanical properties are planned: a broad introduction for undergraduates, a high level graduate level course, and a specialized course at the graduate level which focuses on aspects on mechanical properties specific to small dimensions. Opportunities are offered for interested external learners to obtain up-to-date information regarding mechanical properties in small dimensions through a series of tutorials and an electronic course for remote learners.%%%This detailed study of dislocation interactions and of dislocation behavior near film/substrate and film/passivation interfaces is important to understanding bulk behavior. Since metal films on substrates are critical elements in a range of high-technology applications, the research should generate knowledge of immediate use to industry, in particular with respect to understanding and improving reliability in microelectronics, micromechanical and optical devices, and coatings. ***9875119BakerThis CAREER grant explores the special mechanical properties that arise in very small volumes and integrates it with a modern education program in the area of mechanical properties of materials. The research focuses on deformation mechanisms in thin metal films on substrates. It is now recognized that the mechanical behavior of such films may be very different from that of the same metals in bulk form. The mechanical properties and the behavior of dislocations in thin metal films on substrates are examined in detail via a unique combination of efforts. Stress measurements are conducted using a unique ultra-high-vacuum sputter deposition combined with a substrate curvature measurement system. Advanced microstructural characterization is carried out using transmission electron microscopy and x-ray diffraction methods. Mechanical behavior and microstructure are simulated using finite element and discrete dislocation dynamics methods. By comparing the results of these efforts, detailed knowledge is generated on how microstructural and dimensional constraints on deformation lead to unique film behavior. The educational portion integrates a modern view of mechanical properties into the Cornell materials curriculum, bringing specialized knowledge regarding mechanical properties in small dimensions to individuals in both academe and industry. Three courses in mechanical properties are planned: a broad introduction for undergraduates, a high level graduate level course, and a specialized course at the graduate level which focuses on aspects on mechanical properties specific to small dimensions. Opportunities are offered for interested external learners to obtain up-to-date information regarding mechanical properties in small dimensions through a series of tutorials and an electronic course for remote learners.%%%This detailed study of dislocation interactions and of dislocation behavior near film/substrate and film/passivation interfaces is important to understanding bulk behavior. Since metal films on substrates are critical elements in a range of high-technology applications, the research should generate knowledge of immediate use to industry, in particular with respect to understanding and improving reliability in microelectronics, micromechanical and optical devices, and coatings. ***