CAREER: Deformation Mechanisms in Thin Metal Films
CAREER: Deformation Mechanisms in Thin Metal Films
批准号:
9875119
负责人:
Shefford Baker
金额:
$31.25万
依托单位:
依托单位国家:
美国
项目类别:
Continuing Grant
财政年份:
1999
资助国家:
美国
项目状态:
已结题
起止时间:
1999-02-01 至 2003-01-31
中文摘要
9875119贝克这份职业资助金探索的是在很小的篇幅中出现的特殊机械性能,并将其与材料机械性能领域的现代教育计划相结合。重点研究了金属薄膜在衬底上的变形机制。现在人们认识到,这种薄膜的机械性能可能与块状相同金属的机械性能有很大的不同。通过一种独特的努力组合,详细地研究了衬底上金属薄膜中位错的力学特性和行为。应力测量是使用独特的超高真空溅射沉积结合基片曲率测量系统进行的。利用透射电子显微镜和X射线衍射法进行了先进的微结构表征。用有限元和离散位错动力学方法模拟了合金的力学行为和微观组织。通过比较这些努力的结果,产生了关于变形的微结构和尺寸约束如何导致独特的薄膜行为的详细知识。教育部分将机械性能的现代观点整合到康奈尔材料课程中,为学术界和工业界的个人带来关于小尺寸机械性能的专业知识。计划开设三门机械性能课程:面向本科生的概论课程、研究生水平的高级课程和研究生水平的专门课程,重点关注小尺寸机械性能方面的问题。有兴趣的外部学习者有机会通过一系列教程和远程学习者的电子课程获得有关小尺寸力学性能的最新信息。%这项关于位错相互作用和膜/衬底和膜/钝化界面附近位错行为的详细研究对于理解整体行为很重要。由于衬底上的金属薄膜是一系列高科技应用中的关键元素,研究应产生立即用于工业的知识,特别是在了解和提高微电子、微机械和光学设备以及涂层方面的可靠性方面。*9875119面包师这份职业资助金探索在很小的篇幅中出现的特殊机械性能,并将其与材料机械性能领域的现代教育计划相结合。重点研究了金属薄膜在衬底上的变形机制。现在人们认识到,这种薄膜的机械性能可能与块状相同金属的机械性能有很大的不同。通过一种独特的努力组合,详细地研究了衬底上金属薄膜中位错的力学特性和行为。应力测量是使用独特的超高真空溅射沉积结合基片曲率测量系统进行的。利用透射电子显微镜和X射线衍射法进行了先进的微结构表征。用有限元和离散位错动力学方法模拟了合金的力学行为和微观组织。通过比较这些努力的结果,产生了关于变形的微结构和尺寸约束如何导致独特的薄膜行为的详细知识。教育部分将机械性能的现代观点整合到康奈尔材料课程中,为学术界和工业界的个人带来关于小尺寸机械性能的专业知识。计划开设三门机械性能课程:面向本科生的概论课程、研究生水平的高级课程和研究生水平的专门课程,重点关注小尺寸机械性能方面的问题。有兴趣的外部学习者有机会通过一系列教程和远程学习者的电子课程获得有关小尺寸力学性能的最新信息。%这项关于位错相互作用和膜/衬底和膜/钝化界面附近位错行为的详细研究对于理解整体行为很重要。由于衬底上的金属薄膜是一系列高科技应用中的关键元素,研究应产生立即用于工业的知识,特别是在了解和提高微电子、微机械和光学设备以及涂层方面的可靠性方面。***
英文摘要
9875119BakerThis CAREER grant explores the special mechanical properties that arise in very small volumes and integrates it with a modern education program in the area of mechanical properties of materials. The research focuses on deformation mechanisms in thin metal films on substrates. It is now recognized that the mechanical behavior of such films may be very different from that of the same metals in bulk form. The mechanical properties and the behavior of dislocations in thin metal films on substrates are examined in detail via a unique combination of efforts. Stress measurements are conducted using a unique ultra-high-vacuum sputter deposition combined with a substrate curvature measurement system. Advanced microstructural characterization is carried out using transmission electron microscopy and x-ray diffraction methods. Mechanical behavior and microstructure are simulated using finite element and discrete dislocation dynamics methods. By comparing the results of these efforts, detailed knowledge is generated on how microstructural and dimensional constraints on deformation lead to unique film behavior. The educational portion integrates a modern view of mechanical properties into the Cornell materials curriculum, bringing specialized knowledge regarding mechanical properties in small dimensions to individuals in both academe and industry. Three courses in mechanical properties are planned: a broad introduction for undergraduates, a high level graduate level course, and a specialized course at the graduate level which focuses on aspects on mechanical properties specific to small dimensions. Opportunities are offered for interested external learners to obtain up-to-date information regarding mechanical properties in small dimensions through a series of tutorials and an electronic course for remote learners.%%%This detailed study of dislocation interactions and of dislocation behavior near film/substrate and film/passivation interfaces is important to understanding bulk behavior. Since metal films on substrates are critical elements in a range of high-technology applications, the research should generate knowledge of immediate use to industry, in particular with respect to understanding and improving reliability in microelectronics, micromechanical and optical devices, and coatings. ***9875119BakerThis CAREER grant explores the special mechanical properties that arise in very small volumes and integrates it with a modern education program in the area of mechanical properties of materials. The research focuses on deformation mechanisms in thin metal films on substrates. It is now recognized that the mechanical behavior of such films may be very different from that of the same metals in bulk form. The mechanical properties and the behavior of dislocations in thin metal films on substrates are examined in detail via a unique combination of efforts. Stress measurements are conducted using a unique ultra-high-vacuum sputter deposition combined with a substrate curvature measurement system. Advanced microstructural characterization is carried out using transmission electron microscopy and x-ray diffraction methods. Mechanical behavior and microstructure are simulated using finite element and discrete dislocation dynamics methods. By comparing the results of these efforts, detailed knowledge is generated on how microstructural and dimensional constraints on deformation lead to unique film behavior. The educational portion integrates a modern view of mechanical properties into the Cornell materials curriculum, bringing specialized knowledge regarding mechanical properties in small dimensions to individuals in both academe and industry. Three courses in mechanical properties are planned: a broad introduction for undergraduates, a high level graduate level course, and a specialized course at the graduate level which focuses on aspects on mechanical properties specific to small dimensions. Opportunities are offered for interested external learners to obtain up-to-date information regarding mechanical properties in small dimensions through a series of tutorials and an electronic course for remote learners.%%%This detailed study of dislocation interactions and of dislocation behavior near film/substrate and film/passivation interfaces is important to understanding bulk behavior. Since metal films on substrates are critical elements in a range of high-technology applications, the research should generate knowledge of immediate use to industry, in particular with respect to understanding and improving reliability in microelectronics, micromechanical and optical devices, and coatings. ***
期刊论文(0)
专著(0)
科研奖励(0)
会议论文
Metastable phases in BCC thin films: formation, stability, and properties
-
批准号:1810138
-
项目类别:Continuing Grant
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资助金额:$51.91万
-
财政年份:2018
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负责人:Shefford Baker
-
依托单位:
Driving forces and orientation selection during texture transformations in thin metal films
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批准号:1411024
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项目类别:Continuing Grant
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资助金额:$39.0万
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财政年份:2014
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负责人:Shefford Baker
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依托单位:
Texture and Texture Transformations in Thin Metal Films
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批准号:1106223
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项目类别:Continuing Grant
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资助金额:$39.0万
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财政年份:2011
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负责人:Shefford Baker
-
依托单位:
Microstructure and Mechanical Behavior of Tantalum Thin Films
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批准号:0706507
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项目类别:Continuing Grant
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资助金额:$36.0万
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财政年份:2007
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负责人:Shefford Baker
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依托单位:
US-France Cooperative Research: Inhomogeneous Strains in Thin Films and Nanostructures
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批准号:0233283
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项目类别:Standard Grant
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资助金额:$1.8万
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财政年份:2003
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负责人:Shefford Baker
-
依托单位:
Stresses, Deformation, and Dislocations in Thin Films: Combining Modeling and Simulations with Experiments
-
批准号:0311848
-
项目类别:Continuing Grant
-
资助金额:$0.0万
-
财政年份:2003
-
负责人:Shefford Baker
-
依托单位:
Development of X-ray Diffraction Equipment for Research, Education, Training, and Outreach at a Synchrotron Source
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批准号:0216881
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项目类别:Standard Grant
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资助金额:$14.44万
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财政年份:2002
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负责人:Shefford Baker
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依托单位:
Acquisition of an Atomic Force Microscope for Mechanical and Magnetic Property Measurements in Small Dimensions and Student Training
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批准号:9975924
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项目类别:Standard Grant
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资助金额:$8.14万
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财政年份:1999
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负责人:Shefford Baker
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依托单位:
U.S.-Germany Cooperative Research: Stresses and Deformation Mechanisms in Thin Metal Films
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批准号:9815702
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项目类别:Standard Grant
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资助金额:$1.2万
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财政年份:1999
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负责人:Shefford Baker
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依托单位:
海外基金