CAREER: Deformation Mechanisms in Thin Metal Films

职业：金属薄膜的变形机制

• 批准号: 9875119
• 负责人: Shefford Baker
• 金额: $ 31.25万
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-02-01 至 2003-01-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9875119&HistoricalAwards=false
• 关键词: CAREER; Deformation; Mechanisms; Thin; Metal

9875119BakerThis CAREER grant explores the special mechanical properties that arise in very small volumes and integrates it with a modern education program in the area of mechanical properties of materials. The research focuses on deformation mechanisms in thin metal films on substrates. It is now recognized that the mechanical behavior of such films may be very different from that of the same metals in bulk form. The mechanical properties and the behavior of dislocations in thin metal films on substrates are examined in detail via a unique combination of efforts. Stress measurements are conducted using a unique ultra-high-vacuum sputter deposition combined with a substrate curvature measurement system. Advanced microstructural characterization is carried out using transmission electron microscopy and x-ray diffraction methods. Mechanical behavior and microstructure are simulated using finite element and discrete dislocation dynamics methods. By comparing the results of these efforts, detailed knowledge is generated on how microstructural and dimensional constraints on deformation lead to unique film behavior. The educational portion integrates a modern view of mechanical properties into the Cornell materials curriculum, bringing specialized knowledge regarding mechanical properties in small dimensions to individuals in both academe and industry. Three courses in mechanical properties are planned: a broad introduction for undergraduates, a high level graduate level course, and a specialized course at the graduate level which focuses on aspects on mechanical properties specific to small dimensions. Opportunities are offered for interested external learners to obtain up-to-date information regarding mechanical properties in small dimensions through a series of tutorials and an electronic course for remote learners.%%%This detailed study of dislocation interactions and of dislocation behavior near film/substrate and film/passivation interfaces is important to understanding bulk behavior. Since metal films on substrates are critical elements in a range of high-technology applications, the research should generate knowledge of immediate use to industry, in particular with respect to understanding and improving reliability in microelectronics, micromechanical and optical devices, and coatings. ***9875119BakerThis CAREER grant explores the special mechanical properties that arise in very small volumes and integrates it with a modern education program in the area of mechanical properties of materials. The research focuses on deformation mechanisms in thin metal films on substrates. It is now recognized that the mechanical behavior of such films may be very different from that of the same metals in bulk form. The mechanical properties and the behavior of dislocations in thin metal films on substrates are examined in detail via a unique combination of efforts. Stress measurements are conducted using a unique ultra-high-vacuum sputter deposition combined with a substrate curvature measurement system. Advanced microstructural characterization is carried out using transmission electron microscopy and x-ray diffraction methods. Mechanical behavior and microstructure are simulated using finite element and discrete dislocation dynamics methods. By comparing the results of these efforts, detailed knowledge is generated on how microstructural and dimensional constraints on deformation lead to unique film behavior. The educational portion integrates a modern view of mechanical properties into the Cornell materials curriculum, bringing specialized knowledge regarding mechanical properties in small dimensions to individuals in both academe and industry. Three courses in mechanical properties are planned: a broad introduction for undergraduates, a high level graduate level course, and a specialized course at the graduate level which focuses on aspects on mechanical properties specific to small dimensions. Opportunities are offered for interested external learners to obtain up-to-date information regarding mechanical properties in small dimensions through a series of tutorials and an electronic course for remote learners.%%%This detailed study of dislocation interactions and of dislocation behavior near film/substrate and film/passivation interfaces is important to understanding bulk behavior. Since metal films on substrates are critical elements in a range of high-technology applications, the research should generate knowledge of immediate use to industry, in particular with respect to understanding and improving reliability in microelectronics, micromechanical and optical devices, and coatings. ***

9875119 BakerThis CAREER grant探索了在非常小的体积中出现的特殊机械性能，并将其与材料机械性能领域的现代教育计划相结合。 研究的重点是在衬底上的薄金属薄膜的变形机制。 现在人们认识到，这种薄膜的机械性能可能与块体形式的相同金属的机械性能非常不同。通过一个独特的组合的努力，在基板上的薄金属膜的机械性能和位错的行为进行了详细的检查。 应力测量使用独特的超高真空溅射沉积结合基板曲率测量系统进行。 先进的微观结构表征进行了使用透射电子显微镜和X射线衍射方法。 采用有限元和离散位错动力学方法模拟力学行为和微观组织。通过比较这些努力的结果，详细的知识是如何产生的微观结构和变形的尺寸约束导致独特的薄膜行为。教育部分将机械性能的现代观点整合到康奈尔材料课程中，为企业和工业中的个人带来有关小尺寸机械性能的专业知识。 计划在机械性能的三门课程：本科生的广泛介绍，高水平的研究生水平的课程，并在研究生水平的专业课程，侧重于具体到小尺寸的机械性能方面。 通过一系列教程和远程学习者电子课程，为感兴趣的外部学习者提供了获得小尺寸机械性能最新信息的机会。%这种位错的相互作用和附近的膜/基板和膜/钝化界面的位错行为的详细研究是重要的理解体行为。 由于基板上的金属薄膜是一系列高技术应用中的关键要素，因此研究应产生可立即用于工业的知识，特别是在理解和提高微电子、微机械和光学器件以及涂层的可靠性方面。 * 9875119 BakerThis CAREER grant探索了在非常小的体积中出现的特殊机械性能，并将其与材料机械性能领域的现代教育计划相结合。 研究的重点是在衬底上的薄金属薄膜的变形机制。 现在人们认识到，这种薄膜的机械性能可能与块体形式的相同金属的机械性能非常不同。通过一个独特的组合的努力，在基板上的薄金属膜的机械性能和位错的行为进行了详细的检查。 应力测量使用独特的超高真空溅射沉积结合基板曲率测量系统进行。 先进的微观结构表征进行了使用透射电子显微镜和X射线衍射方法。 采用有限元和离散位错动力学方法模拟力学行为和微观组织。通过比较这些努力的结果，详细的知识是如何产生的微观结构和变形的尺寸约束导致独特的薄膜行为。教育部分将机械性能的现代观点整合到康奈尔大学材料课程中，为学术界和工业界的个人带来有关小尺寸机械性能的专业知识。 计划在机械性能的三门课程：本科生的广泛介绍，高水平的研究生水平的课程，并在研究生水平的专业课程，侧重于具体到小尺寸的机械性能方面。 通过一系列教程和远程学习者电子课程，为感兴趣的外部学习者提供了获得小尺寸机械性能最新信息的机会。%这种位错的相互作用和附近的膜/基板和膜/钝化界面的位错行为的详细研究是重要的理解体行为。 由于基板上的金属薄膜是一系列高技术应用中的关键要素，因此研究应产生可立即用于工业的知识，特别是在理解和提高微电子、微机械和光学器件以及涂层的可靠性方面。 ***