Advanced Mechanical Testing of MEMS Materials

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Microelectromechanical systems (MEMS) are tiny pressure transducers,accelerometers, etc. having features as small as 1 micrometer and fabricatedfrom vapor-deposited polycrystalline silicon and similar materials. The firstobjective of this research is to develop techniques and procedures fortensile testing of these materials in order to determine whether the size of thespecimen and the complexity of the stress affect their properties. Thesecond objective is to develop new test methods to cycle tiny specimens intension and measure their response to cyclic loading. Material properties of these new structural materials are required for intelligent design and life prediction of novel microdevices.***