Mechanical Testing and Microstructural Studies of MEMS Materials

MEMS 材料的机械测试和微观结构研究

• 批准号: 9634703
• 负责人: William Sharpe
• 金额: $ 30.47万
• 依托单位: Johns Hopkins University
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-09-15 至 1999-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9634703&HistoricalAwards=false
• 关键词: Mechanical; Testing; Microstructural; Studies; MEMS

9634703 Sharpe This research is to support an effort that provides a solid foundation for the design of microelectromechanical systems (MEMS) by providing mechanical properties for very small specimens. This type data can be used to help optimize the designs of the small devices. Prior NSF supported efforts have led to an experimental technique for performing tests on silicon speaimens having a thickness between 3 and 300 micrometers. The efforts in this new program will be to determine Poison's ration for, and in conducting detailed and comprehensive microstructural studies of, thin specimens of the MEMS materials. Recent MEMS applications have involved slightly thicker specimens of materials other than silicon. Such specimens will also be investigated. ***

这项研究是为了通过提供非常小的样品的机械性能，为微机电系统（MEMS）的设计提供坚实的基础。这种类型的数据可以用来帮助优化小型设备的设计。先前NSF支持的努力已经导致了一种实验技术，用于在厚度在3到300微米之间的硅试样上进行测试。这个新项目的工作将是确定Poison的定量，并对MEMS材料的薄样品进行详细和全面的微观结构研究。最近的MEMS应用涉及比硅稍厚的材料样品。还将对这些标本进行调查。* * *