Mechanical Testing and Microstructural Studies of MEMS Materials

9634703夏普这项研究是为了支持一项努力，提供了一个坚实的基础，为微机电系统（MEMS）的设计提供了非常小的标本的机械性能。 这种类型的数据可以用来帮助优化小型设备的设计。 先前NSF支持的努力已经导致用于对厚度在3微米和300微米之间的硅微透镜执行测试的实验技术。 在这个新的计划的努力将是确定毒药的定量，并在进行详细和全面的微观结构研究，薄标本的MEMS材料。 最近的MEMS应用涉及比硅稍厚的材料样品。 还将对这些标本进行调查。 ***

9634703 Sharpe This research is to support an effort that provides a solid foundation for the design of microelectromechanical systems (MEMS) by providing mechanical properties for very small specimens. This type data can be used to help optimize the designs of the small devices. Prior NSF supported efforts have led to an experimental technique for performing tests on silicon speaimens having a thickness between 3 and 300 micrometers. The efforts in this new program will be to determine Poison's ration for, and in conducting detailed and comprehensive microstructural studies of, thin specimens of the MEMS materials. Recent MEMS applications have involved slightly thicker specimens of materials other than silicon. Such specimens will also be investigated. ***