Long-Stroke Fast Tool Servo for Diamond Turning of Asymmetric Optics

用于非对称光学器件金刚石车削的长冲程快刀伺服系统

• 批准号: 9908325
• 负责人: David Trumper
• 金额: $ 32万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9908325&HistoricalAwards=false
• 关键词: Long; Stroke; Fast; Tool; Servo

This project will design, build, and test a novel fast-tool servomechanism for nanometer-resolution diamond turning of large-amplitude asymmetric surfaces. It is motivated by the increasing need for optical surfaces with no axis of rotational symmetry. Examples of this type of surface include spectacle and contact lenses, human lens implants, elements for laser eye surgery, and components in consumer and professional cameras, as well as image-train elements in devices such as semiconductor photolithographic steppers and scanners, laser printers, and other image processing equipment. At present, elements with low-amplitude asymmetry ( 500 micrometers) can be fabricated on commercially available machines using a piezoelectrically driven fast tool servo. However, no device existing at present can achieve significantly larger stroke lengths along with the necessary accelerations and positioning accuracy to fabricate as-cut functional optics with significant asymmetry. If successful, the project result will fill the significant gap in current manufacturing capabilities and allow the economical production of a wide variety of novel optical systems.

本计画将设计、建构及测试一种新颖的快速刀具伺服机构，以奈米解析度钻石车削大幅非对称表面。 其动机是对没有旋转对称轴的光学表面的需求日益增加。 这种类型的表面的实例包括眼镜和隐形眼镜、人类透镜植入物、用于激光眼科手术的元件和消费者和专业相机中的组件，以及诸如半导体光刻机和扫描仪、激光打印机和其他图像处理设备的装置中的图像序列元件。 目前，具有低振幅不对称性（500微米）的元件可以在商业上可用的机器上使用压电驱动的快速工具伺服来制造。然而，目前没有现有的设备可以实现显著更大的行程长度沿着以及必要的加速度和定位精度，以制造具有显著不对称性的切割功能光学器件。如果成功，该项目的结果将填补目前制造能力的重大空白，并允许经济地生产各种新型光学系统。