Engineering Research Equipment: Equipment for High Lateral Resolution Lithography

工程研究设备： 高横向分辨率光刻设备

• 批准号: 9500019
• 负责人: David Trumper
• 金额: $ 8.6万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1995
• 资助国家: 美国
• 起止时间: 1995-04-15 至 1997-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9500019&HistoricalAwards=false
• 关键词: Engineering; Research; Equipment; Lateral; Resolution

9500019 Trumper This engineering research equipment award will be used to build a unique high lateral resolution positioning system: 1.0 nm repeatability in a 25mm x 25 mm x 100 micrometer space. This system forms the basis for what is termed the long-range scanning stage (LORS), a critical component in the next generation of equipment used to manufacture integrated circuits, photo-masks, and micromechanical actuators. The basic components funded by this award are a scanned probe microscope comprised of a system controller and a sample stage for scanning transmission or atomic force microscopy, a laser interferometry system, and a high speed data acquisition and digital signal processing system. The design is based on the investigator's expertise in hybrid oil/magnetic bearings that achieve a mechanical noise level of 0.4 nm peak-to-peak. This precision mechanical positioning device is a new concept, that will form the basis for new types of ultra precision manufacturing equipment needed to produce high value precision or micromechanical products, and photo-masks for integrated circuits. ***

9500019 Trumper 该工程研究设备奖将用于构建独特的高横向分辨率定位系统：在 25mm x 25 mm x 100 微米空间内实现 1.0 nm 的重复性。 该系统构成了远程扫描阶段 (LORS) 的基础，后者是用于制造集成电路、光掩模和微机械执行器的下一代设备的关键组件。 该奖项资助的基本组件是由系统控制器和用于扫描透射或原子力显微镜的样品台组成的扫描探针显微镜、激光干涉测量系统以及高速数据采集和数字信号处理系统。 该设计基于研究人员在混合油/磁轴承方面的专业知识，可实现 0.4 nm 峰峰值的机械噪声水平。 这种精密机械定位装置是一个新概念，它将成为生产高价值精密或微机械产品以及集成电路光掩模所需的新型超精密制造设备的基础。 ***