Engineering Research Equipment: Equipment for High Lateral Resolution Lithography

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9500019 Trumper This engineering research equipment award will be used to build a unique high lateral resolution positioning system: 1.0 nm repeatability in a 25mm x 25 mm x 100 micrometer space. This system forms the basis for what is termed the long-range scanning stage (LORS), a critical component in the next generation of equipment used to manufacture integrated circuits, photo-masks, and micromechanical actuators. The basic components funded by this award are a scanned probe microscope comprised of a system controller and a sample stage for scanning transmission or atomic force microscopy, a laser interferometry system, and a high speed data acquisition and digital signal processing system. The design is based on the investigator's expertise in hybrid oil/magnetic bearings that achieve a mechanical noise level of 0.4 nm peak-to-peak. This precision mechanical positioning device is a new concept, that will form the basis for new types of ultra precision manufacturing equipment needed to produce high value precision or micromechanical products, and photo-masks for integrated circuits. ***