Analysis and Design of a Viscously-Damped Magnetic Suspension System

粘性阻尼磁悬浮系统的分析与设计

• 批准号: 9114737
• 负责人: David Trumper
• 金额: $ 25.85万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1991
• 资助国家: 美国
• 起止时间: 1991-09-01 至 1995-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9114737&HistoricalAwards=false
• 关键词: Analysis; Design; Viscously; Damped; Magnetic

The objective of this research is to analyze, design, construct and test a precision, magnetically-suspended, six degrees-of-freedom motion control stage with 1 Angstrom resolution (0.004 micrometer) in a 100 micrometer cube of accessible travel. The suspended platen will be floated in oil to support its weight and provide mechanical damping and high-frequency coupling. Advances will be made in sensors, actuators, precision control algorithms and mechanical design. The research techniques can be scaled, in principle, to larger travels and lessor degrees of freedom, as necessary from the application perspective. This development will enable the enhancement of the performance of many nano-precision devices, in applications such as scanned probe microscopy, X-ray and optical photolithography, diamond tool machining and probing and analysis of integrated circuit devices. These processes are of considerable utility in the manufacturing of a variety of devices and products that are vital to the economy of the nation.

本研究的目的是分析，设计， 建造并测试一个精密的磁悬浮六 具有1埃分辨率的自由度运动控制平台 （0.004微米）在100微米立方体的可接近行程中。 悬浮的压板将漂浮在油中以支撑其重量 并提供机械阻尼和高频耦合。 在传感器、执行器、精密控制等方面将取得进展 算法和机械设计。研究技术可以是 原则上，按比例调整，以适应更大的旅行和更小的学位， 自由，从应用的角度来看是必要的。 这一发展将有助于加强 许多纳米精密器件的性能， 如扫描探针显微镜、X射线和光学光刻， 金刚石工具加工与探测分析一体化 电路器件 这些方法在以下方面具有相当大的实用性： 制造各种设备和产品， 对国家经济至关重要。