Analysis and Design of a Viscously-Damped Magnetic Suspension System

这项研究的目标是分析、设计、建造和测试一个精密的、磁悬浮的六自由度运动控制平台，其分辨率为1埃(0.004微米)，位于一个100微米的可接近移动立方体中。悬浮压盘将漂浮在油中，以支撑其重量，并提供机械减振和高频耦合。在传感器、执行器、精密控制算法和机械设计方面将取得进展。从应用的角度来看，研究技术原则上可以根据需要扩展到更大的行程和较小的自由度。这一发展将使许多纳米精密器件的性能得到提高，应用领域包括扫描探针显微镜、X射线和光学光刻、金刚石工具加工以及集成电路器件的探测和分析。这些工艺在制造对国家经济至关重要的各种设备和产品方面具有相当大的实用价值。

The objective of this research is to analyze, design, construct and test a precision, magnetically-suspended, six degrees-of-freedom motion control stage with 1 Angstrom resolution (0.004 micrometer) in a 100 micrometer cube of accessible travel. The suspended platen will be floated in oil to support its weight and provide mechanical damping and high-frequency coupling. Advances will be made in sensors, actuators, precision control algorithms and mechanical design. The research techniques can be scaled, in principle, to larger travels and lessor degrees of freedom, as necessary from the application perspective. This development will enable the enhancement of the performance of many nano-precision devices, in applications such as scanned probe microscopy, X-ray and optical photolithography, diamond tool machining and probing and analysis of integrated circuit devices. These processes are of considerable utility in the manufacturing of a variety of devices and products that are vital to the economy of the nation.