Analysis and Design of a Long Range Scanning Stage

长距离扫描台的分析与设计

• 批准号: 9414778
• 负责人: David Trumper
• 金额: $ 30.95万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1994
• 资助国家: 美国
• 起止时间: 1994-10-01 至 1998-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9414778&HistoricalAwards=false
• 关键词: Analysis; Design; Long; Range; Scanning

9414778 Trumper The award is for research to analyze, construct, and test a precision magnetically-suspended six degree-of-freedom motion control stage with 25 angstrom resolution. The workspace is 25 mm by 25 mm by 100 micrometers. The stage will have a repeatability of 5 nanometers, and an accuracy of 20 nanometers. The stage uses a hybrid magnetic/fluid bearing structure, the oil providing mechanical damping and the electromagnetic actuators imposing control forces. Integrated circuit capacitance displacement probes will be developed as will a multipass laser interferometer with enhanced resolution. Mechanical designs and electromagnetic actuator topologies to achieve the desired travel and actuator goals will also de developed. System integration and control issues will also be addressed. The stage will enable imaging of groups of atoms in conjunction with probed microscopes. In addition, it would be useful for measurements associated with present and future generations of integrated circuits, photo-masks, and micromechaical actuators.

该奖项用于研究分析、构建和测试25埃分辨率的精密磁悬浮六自由度运动控制平台。工作空间是25毫米乘25毫米乘100微米。该平台的可重复性为5纳米，精度为20纳米。该平台采用磁/流体混合轴承结构，油提供机械阻尼，电磁执行器施加控制力。集成电路电容位移探头将被开发，多通激光干涉仪将提高分辨率。机械设计和电磁致动器拓扑，以实现所需的行程和致动器目标也将开发。系统集成和控制问题也将得到解决。该平台将能够与探针显微镜一起对原子群进行成像。此外，它还可用于与当前和未来几代集成电路、光电掩模和微机械致动器相关的测量。