SBIR Phase I: Combinatorial Approach to the Discovery of Improved Transparent Conducting Oxides

这个小企业创新研究第一阶段项目旨在利用组合方法发现改进的透明导电氧化物（TCO），并开发一种能够快速表征TCO库的仪器。TCO薄膜同时显示出高光学透明度（90%）和接近金属导电性的特性，这对从光伏到平板显示器的许多光电应用都很重要。我们的三个阶段计划是使用组合方法来确定最有希望的金属氧化物组合，确定该化合物的最佳氧掺杂，然后开发商业规模的沉积工艺，可用于每月生产数百万平方英尺的tco。本提案中描述的研究将通过提供卓越性能的材料和能够筛选大型光电材料和器件库的仪器，对TCO制造商的生产力和效率产生重大影响，这些材料和器件将用于生产规模的晶圆，薄膜和器件的商业化测试。

This Small Business Innovation Research Phase I project is designed to discover improved transparent conducting oxides (TCOs) utilizing the combinatorial approach, and to develop an instrument capable of rapidly characterizing the TCO libraries. TCO thin films simultaneously display the properties of high optical transparency (90%) and near metallic conductivity that are important to many opto-electronic applications from photovoltaics to flat panel displays. Our three-phase plan is to use the combinatorial approach to identify the most promising combination of metal oxides, to determine the optimal oxygen doping of this compound, and then to develop a commercial-scale deposition process that can be used to manufacture millions of square feet of TCOs per month. The research described in this proposal will have a significant impact on the productivity and efficiency of TCO manufacturers by providing materials of superior performance and an instrument capable of screening large libraries of opto-electronic materials and devices that will be commercialized for the testing of wafers, films, and devices on the production-scale.