SBIR Phase I: Monochromatic Micro X-ray Fluorescence Analysis Using Toroidal Crystal Optics

SBIR 第一阶段：使用环形晶体光学器件进行单色微 X 射线荧光分析

• 批准号: 9960403
• 负责人: Zewu Chen
• 金额: $ 9.75万
• 依托单位: X-RAY OPTICAL SYSTEMS, INC.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-01-01 至 2000-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9960403&HistoricalAwards=false
• 关键词: SBIR; Phase; Monochromatic; Micro; ray

This Small Business Innovation Research Phase I project will develop an improved micro x-ray fluorescence instrument for thin film measurements. A new technique, monochromatic micro x-ray fluorescence (MMXRF) analysis using doubly curved crystal optics, can meet this significant market need. A toroidal crystal can focus characteristic x-rays from a microfocus x-ray source based upon diffraction. The focused beam is monochromatic and the beam size is expected to be significantly smaller than that of current MXRF systems. In this Phase I project, toroidal crystals for focusing Cu Ka1 and Mo Ka1 photons will be designed and fabricated using silicon and mica crystals. The reflection and focusing properties of the optics will be investigated and the feasibility of the MMXRF technique for critical semiconductor applications will be evaluated. This technique will provide high sensitivity and enhance excitation of low Z elements with the selection of beam energy. In addition, this technique will significantly increase the speed of high energy x-ray measurements. An MMXRF instrument is expected to provide process control in the metallization process of silicon wafers and chip packaging.

这个小企业创新研究第一阶段项目将开发一种改进的微型X射线荧光仪器，用于薄膜测量。一种新的技术，单色显微X射线荧光（MMXRF）分析使用双弯曲晶体光学，可以满足这一重大的市场需求。环形晶体可以根据衍射聚焦来自微焦点x射线源的特征x射线。聚焦光束是单色的，光束尺寸预计将明显小于目前的MXRF系统。在这个第一阶段的项目中，将使用硅和云母晶体设计和制造用于聚焦Cu Ka 1和Mo Ka 1光子的环形晶体。将研究光学器件的反射和聚焦特性，并评估MMXRF技术在关键半导体应用中的可行性。 该技术将提供高灵敏度，并通过选择束能量来增强低Z元素的激发。此外，该技术将显著提高高能X射线测量的速度。MMXRF仪器有望在硅晶片和芯片封装的金属化过程中提供过程控制。