SBIR Phase I: Monochromatic Micro X-ray Fluorescence Analysis Using Toroidal Crystal Optics

这个小企业创新研究第一阶段项目将开发一种用于薄膜测量的改进的微型x射线荧光仪器。一种利用双弯曲晶体光学的单色微x射线荧光（MMXRF）分析新技术可以满足这一重要的市场需求。环形晶体可以根据衍射将来自微聚焦x射线源的特征x射线聚焦。聚焦光束是单色的，光束尺寸预计将大大小于当前的MXRF系统。在这个一期项目中，将使用硅和云母晶体设计和制造用于聚焦Cu Ka1和Mo Ka1光子的环形晶体。将研究光学器件的反射和聚焦特性，并评估MMXRF技术在关键半导体应用中的可行性。该技术将提供高灵敏度和增强激发低Z元素与光束能量的选择。此外，该技术将显著提高高能x射线测量的速度。MMXRF仪器有望在硅片和芯片封装的金属化过程中提供过程控制。

This Small Business Innovation Research Phase I project will develop an improved micro x-ray fluorescence instrument for thin film measurements. A new technique, monochromatic micro x-ray fluorescence (MMXRF) analysis using doubly curved crystal optics, can meet this significant market need. A toroidal crystal can focus characteristic x-rays from a microfocus x-ray source based upon diffraction. The focused beam is monochromatic and the beam size is expected to be significantly smaller than that of current MXRF systems. In this Phase I project, toroidal crystals for focusing Cu Ka1 and Mo Ka1 photons will be designed and fabricated using silicon and mica crystals. The reflection and focusing properties of the optics will be investigated and the feasibility of the MMXRF technique for critical semiconductor applications will be evaluated. This technique will provide high sensitivity and enhance excitation of low Z elements with the selection of beam energy. In addition, this technique will significantly increase the speed of high energy x-ray measurements. An MMXRF instrument is expected to provide process control in the metallization process of silicon wafers and chip packaging.