SBIR Phase I: Integrated Planar Positioner with a Two-Dimensional Concentrated-Field Magnet Matrix for Flexible Manufacturing and Automation

这个小型企业创新研究第一阶段项目提供了一种独特的集成平面定位器，用于柔性制造和自动化。微电子制造中的下一代机架内和机架间自动化需要紧凑、轻便和坚固的结构来进行材料处理和加工。提出的平面定位技术是对现有采用二维集中场磁矩阵的定位器的重大改进和简化。在这种定位器中，扩展的平面运动生成只需要一个单一的集成电机。其他自由度可以通过反馈控制或使开环稳定。单动部件与机架之间无机械接触，无微粒污染，适用于洁净室作业。在第一阶段，我们将设计、制造和演示一个二维定位器的原型，以证明其可行性。半导体市场正从最近的衰退中复苏。该行业的长期增长前景非常好。随着整个工艺的复杂性和晶圆尺寸的增加，自动材料处理在半导体制造中变得越来越重要。为洁净室、极端温度或真空环境的制造工艺提供可靠的低成本平面定位将是微电子制造、包装、机床和高精度检测阶段行业的优先事项。

This Small Business Innovation Research Phase I project presents a unique integrated planar positioner for flexible manufacturing and automation. Next-generation intrabay and interbay automation in microelectronics manufacturing requires a compact, lightweight, and rigid structure for material handling and processing. The proposed planar positioning technology is a significant advance and simplification of existing positioners that employ a two-dimensional concentrated-field magnet matrix. In this positioner, only a single integrated motor is required for extended planar motion generation. The other degrees of freedom can be controlled by feedback or made open-loop stable. There is no mechanical contact between the single moving part and the machine frame, and no particulate contamination, which makes this technology suitable for clean-room operations. In Phase I, we will design, fabricate, and demonstrate a prototype two-dimensional positioner in order to prove feasibility.The semiconductor market is recovering from a recent recession. The long-term outlook for growth of the industry is extremely good. As the complexity of the overall process and the size of the wafer grow, automatic material handling becomes ever more important in semiconductor fabrication. Reliable low cost planar positioning for manufacturing processes for clean room, extreme-temperature, or vacuum environments will be a priority in microelectronics manufacturing, packaging, machine tool, and high-precision inspection stage industries.