SBIR Phase I: Integrated Planar Positioner with a Two-Dimensional Concentrated-Field Magnet Matrix for Flexible Manufacturing and Automation

SBIR 第一阶段：具有二维集中场磁体矩阵的集成平面定位器，用于灵活制造和自动化

• 批准号: 9960653
• 负责人: Won-jong Kim
• 金额: $ 9.99万
• 依托单位: SATCON TECHNOLOGY CORPORATION
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-01-01 至 2000-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9960653&HistoricalAwards=false
• 关键词: SBIR; Phase; Integrated; Planar; Positioner

This Small Business Innovation Research Phase I project presents a unique integrated planar positioner for flexible manufacturing and automation. Next-generation intrabay and interbay automation in microelectronics manufacturing requires a compact, lightweight, and rigid structure for material handling and processing. The proposed planar positioning technology is a significant advance and simplification of existing positioners that employ a two-dimensional concentrated-field magnet matrix. In this positioner, only a single integrated motor is required for extended planar motion generation. The other degrees of freedom can be controlled by feedback or made open-loop stable. There is no mechanical contact between the single moving part and the machine frame, and no particulate contamination, which makes this technology suitable for clean-room operations. In Phase I, we will design, fabricate, and demonstrate a prototype two-dimensional positioner in order to prove feasibility.The semiconductor market is recovering from a recent recession. The long-term outlook for growth of the industry is extremely good. As the complexity of the overall process and the size of the wafer grow, automatic material handling becomes ever more important in semiconductor fabrication. Reliable low cost planar positioning for manufacturing processes for clean room, extreme-temperature, or vacuum environments will be a priority in microelectronics manufacturing, packaging, machine tool, and high-precision inspection stage industries.

这个小型企业创新研究第一阶段项目提出了一个独特的集成平面定位器的灵活制造和自动化。 微电子制造中的下一代台内和台间自动化需要一种紧凑、轻质和刚性的结构来进行材料处理和加工。 所提出的平面定位技术是采用二维集中场磁体矩阵的现有定位器的显著进步和简化。 在这种定位器中，只需要一个集成电机来产生扩展的平面运动。 其他自由度可以通过反馈控制或使开环稳定。 单个移动部件和机架之间没有机械接触，也没有颗粒污染，这使得该技术适用于洁净室操作。 在第一阶段，我们将设计、制造和演示一个二维定位器的原型，以证明其可行性。 该行业的长期增长前景非常好。 随着整个工艺的复杂性和晶片尺寸的增长，自动材料处理在半导体制造中变得越来越重要。 用于洁净室、极端温度或真空环境的制造工艺的可靠的低成本平面定位将是微电子制造、包装、机床和高精度检测台行业的优先事项。