POWRE: Thin Film Magnets Via Reactive RF Co-Sputtering

本计画探讨借由反应性射频共溅镀以精细控制合金成分所制得之永久性Sm/Nd：Fe/Co：N磁性薄膜之内禀与外禀磁性。反应溅射还允许精确地原位插入氮材料以增强磁性，例如提高居里温度，同时减少处理步骤的数量。微观结构特征，如晶粒尺寸和第二相，对磁性能的影响将进行研究。这些特征将通过工艺参数（例如正向功率、溅射压力和衬底温度）以及通过替代合金添加物（例如Mo、Ti、V、Zr、Cu和C）来控制。该项目的一个重要方面是澄清相图和溅射化合物的微观结构-性能关系，这些关系可能与平衡值有很大差异。这是根据研究和教育领域妇女专业机会方案提供的一项研究增强补助金。这项研究与磁记录介质，微机电系统，微传感器，微电机和集成隔离器和环行器的光子集成电路以及单片微波集成电路。该项目还旨在加强本科生、研究生和代表性不足的学生的研究，并开发薄膜加工和光电子领域的本科生和研究生课程。该项目还将加强PI目前在K-12外展方面的活动。该项目由材料研究部和MPS OMA（多学科活动办公室）共同支持。***

This project explores the intrinsic and extrinsic magnetic properties of permanent Sm/Nd:Fe/Co:N magnet films made via reactive rf co-sputtering for fine control of alloy composition. Reactive sputtering also allows precise in-situ insertion of nitrogen interstitials to enhance magnetic properties, such as elevated Curie temperatures, while reducing the number of processing steps. The effect of microstructural features, such as grain size and secondary phases, on the magnetic properties will be investigated. These features will be controlled through processing parameters, such as forward power, sputtering pressure, and substrate temperature, as well as through substitutional alloying additions such as Mo, Ti, V, Zr, Cu and C. An important aspect of the project is the clarification of phase diagrams and resulting microstructure-property relationships of sputtered compounds, which may vary substantially from equilibrium values.%%%This is a research enhancement grant made under the Professional Opportunities for Women in Research and Education (POWRE) program. This research has relevance to magnetic recording media, microelectromechanical systems, microsensors, micromotors and integrated isolators and circulators in photonic integrated circuits as well as monolithic microwave integrated circuits. The project also aims to enhance undergraduate, graduate, and underrepresented student research and to develop undergraduate and graduate courses in the area of thin film processing and optoelectronics. This project will also enhance the PI's current activities in K-12 outreach. The project is co-supported by the Division of Materials Research, and the MPS OMA(Office of Multidisciplinary Activities). ***