Reconfigurable High-Q Evanescent Mode Micromachined Filters for Wireless Communications Front-Ends

适用于无线通信前端的可重新配置高 Q 倏逝模式微机械滤波器

• 批准号: 9979374
• 负责人: Linda Katehi
• 金额: $ 35万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-10-01 至 2003-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9979374&HistoricalAwards=false
• 关键词: Reconfigurable; Evanescent; Mode; Micromachined; Filters

9979374KatehiA novel approach is proposed appropriate for the development of electronically tunable micromachined high-Q evanescent-mode filters. Small size, high-Q filters or filter banks with high isolation between the adjacent channels can be achieved by use of micromachined evanescent-mode cavities that appropriately couple to each other and to the input/output micro-strip or coplanar waveguide transmission lines. These monolithically integrated filters have the ability to electronically reconfigure their electrical performance by use of appropriate MEMS devices. The proposed approach is based on silicon (Si) micromachining and can effectively provide very high-Q and tunability by integrating evanescent mode cavities with MEMS devices in a three dimensional circuit. To allow for electronically adjusted frequency or reconfigurability of pass-band and out-band performance, the MEMS devices are placed at appropriate locations within the filter layout. These MEMS switch-like, compliant or membrane structures will be optimized to achieve as low of an activation voltage as possible and will be used for electronic tuning and control of filter performance.The proposed work will be performed in two steps: (a) development of an evanescent mode filter using micromachined cavities in S, L and X Bands, Co) use of MEMS devices for reconfiguring filter characteristics and the development of a switched diplexer. The fabrication techniques required in this approach are compatible with standard IC processing and for this reason provide very low fabrication cost and very high precision. In the proposed filter configurations, small size and high density will be achieved by vertically integrating the evanescent micromachined cavities and by incorporating an effective on-wafer Si micromachined package to house the MEMS devices and provide critical control of the coupling between the filter resonators. The developed components will be very small in size but of performance comparable to the state of the art waveguide filters in order to demonstrate excellent electrical response in addition to monolithic character, very small size, low cost and high density. As part of this effort, electronic tuning will be designed and implemented to control appropriate geometrical parameters. In addition, the tuning range of the designed filters will be studied and a filter or diplexer with the capability to switch in and out of the circuit will be investigated. The effectiveness of the MEMS devices in reconfiguring the filter characteristics will be evaluated by measuring the possible tuning range and tuning speed and evaluating the resulting Q of the filter The proposed study has as a goal to demonstrate the concept of a monolithic high-Q reconfigurable filter and investigate trade-offs in design in terms of performance, size, fabrication yield and cost. The development and demonstration of the proposed concept will be accomplished via the use of full-wave analysis tools and state of the art fabrication and measurement techniques. Success in this effort has the potential to revolutionarize communications front ends for a variety of wireless applications.****

9979374 KatehiA新的方法提出了电子可调微加工高Q值倏逝模滤波器的发展。小尺寸、高Q值滤波器或相邻通道之间具有高隔离度的滤波器组可以通过使用微机械加工的倏逝模腔来实现，所述倏逝模腔适当地彼此耦合并且耦合到输入/输出微带或共面波导传输线。这些单片集成滤波器具有通过使用适当的MEMS器件来电子地重新配置其电性能的能力。所提出的方法是基于硅（Si）的微机械加工，并可以有效地提供非常高的Q值和可调谐性，通过集成在一个三维电路中的消逝模式腔与MEMS器件。为了允许电子调整频率或通带和带外性能的可重新配置性，MEMS器件被放置在滤波器布局内的适当位置。这些MEMS开关状、顺应性或膜结构将被优化以实现尽可能低的激活电压，并将用于滤波器性能的电子调谐和控制。拟议的工作将分两步进行：（a）在S、L和X波段使用微机械加工腔体开发消逝模式滤波器，共同）使用MEMS器件重新配置滤波器特性和开关双工器的发展。这种方法中所需的制造技术与标准IC处理兼容，因此提供了非常低的制造成本和非常高的精度。在建议的滤波器配置，小尺寸和高密度将实现垂直集成的倏逝波微加工腔，并通过将一个有效的晶圆上硅微加工封装的MEMS器件的房子，并提供关键的控制滤波器谐振器之间的耦合。所开发的组件将是非常小的尺寸，但性能的最先进的波导滤波器的状态，以证明良好的电响应，除了单片字符，非常小的尺寸，低成本和高密度。作为这项工作的一部分，将设计和实施电子调谐，以控制适当的几何参数。此外，所设计的滤波器的调谐范围将进行研究，并与切换和电路的能力的滤波器或双工器将进行调查。MEMS器件在重新配置滤波器特性的有效性将通过测量可能的调谐范围和调谐速度和评估所得到的滤波器的Q值来评估。所提出的研究的目标是演示单片高Q值可重构滤波器的概念，并研究在性能、尺寸、制造产量和成本方面的设计权衡。将通过使用全波分析工具和最先进的制造和测量技术来完成拟议概念的开发和演示。这一努力的成功有可能为各种无线应用带来通信前端的革命性变化。*