SBIR Phase II: Disposable Infrared Water Vapor Sensor

SBIR 第二阶段：一次性红外水蒸气传感器

• 批准号: 9983307
• 负责人: Edward Johnson
• 金额: $ 39.99万
• 依托单位: ION OPTICS INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-05-15 至 2003-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9983307&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Disposable; Infrared

This Small Business Innovation Research Phase II project will develop a prototype instrument ready for field-testing. Phase I research demonstrated the feasibility of a radically simpler infrared gas sensor based on MEMS photonic bandgap structures. This instrument will sensitive enough to compete with water vapor measurements made by much larger, more complex equipment, but cheap enough to be treated as a 'throw-away' device. Unlike current infrared instruments, assembled from many discrete components, it features a highly integrated 'sensor-on-a-chip' employing advanced surface modification technologyand semiconductor fabrication methods. This new, integrated approach replaces discrete-component instruments in much the same way integrated circuits have superseded distributed elements in electronic systems. In addition to the potential for atmospheric research applications, the proposed device is a stepping-stone to next-generation gas sensors for environmental and industrial monitoring. The phase I project showed proof-of-concept while establishing sensitivity and signal-to-noise performance and developed drive circuits and other components to achieve necessary stability. Most important, this project achieved a breakthrough by demonstrating tunable, narrow-band, emission from a photonic bandgap surface structure.The proposed device is a simple, low-cost, lightweight alternative to conventional infrared absorption instruments. By reducing weight, complexity, and cost, it opens applications beyond the reach of current infrared instruments. It is the first step towards next-generation gas sensors for indoor air quality, environmental research, and industrial controls.

这一小型企业创新研究第二阶段项目将开发一种可用于现场测试的原型仪器。第一阶段研究论证了一种基于MEMS光子带隙结构的简单红外气体传感器的可行性。这种仪器将足够灵敏，可以与更大、更复杂的设备进行的水蒸气测量竞争，但又足够便宜，可以被视为“一次性”设备。与目前由许多分立元件组装而成的红外仪器不同，它的特点是采用先进的表面改性技术和半导体制造方法，实现了高度集成的“片上传感器”。这种新的、集成的方法取代了分立元件仪器，就像集成电路取代了电子系统中的分布式元件一样。除了大气研究应用的潜力，拟议的设备是迈向用于环境和工业监测的下一代气体传感器的垫脚石。第一阶段项目展示了概念验证，同时确定了灵敏度和信噪比性能，并开发了驱动电路和其他部件以实现必要的稳定性。最重要的是，该项目取得了突破性进展，展示了光子带隙表面结构的可调谐、窄带发射。所提出的装置是一种简单、低成本、轻量化的传统红外吸收仪器的替代方案。通过降低重量、复杂性和成本，它打开了当前红外仪器无法企及的应用领域。这是迈向用于室内空气质量、环境研究和工业控制的下一代气体传感器的第一步。