SBIR Phase II: Micromachined Vacuum Microelectronic Devices Using Nanoscale Self-Assembly

这个小型企业创新研究（SBIR）第二阶段项目将开发一种新型的低成本真空微电子微制造技术。 由于耐火材料能够承受高温和严重的电磁辐射，因此需要经济可靠的耐火材料微加工。 虽然已经确定了几种材料作为候选材料，但它们具有高成本和高纵横比、高分辨率体微加工的困难。 基于具有独特各向异性形态的自组织纳米多孔阳极氧化铝的方法将允许高纵横比、高分辨率的微加工。 第一阶段表明，具有良好性能的真空微陶瓷可以制造从微机械氧化铝陶瓷。 这可能是制造用于真空微电子和其他应用的陶瓷微机电系统（MEMS）的唯一技术，其在恶劣环境中稳定，具有机械耐久性，与主流微制造兼容，成本较低，并且适当地按比例放大。 第二阶段将优化技术和设计，制造真空集成电路原型潜在的商业应用包括真空微电子学和MEMS，用于太空的恶劣环境、卫星通信、雷达、深钻、核反应堆，以及参加诸如蜂窝电话网络的使用的较不费力的环境，平板显示器和各种传感器

This Small Business Innovation Research (SBIR) Phase II project will develop a novel low-cost microfabrication technology for vacuum microelectronics. Affordable and reliable microfabrication of refractory materials is needed, since these materials are able to withstand high temperature and severe electromagnetic radiation. Although several materials have been identified as candidates, they have both high cost and difficulties with high aspect ratio, high resolution bulk micromachining. An approach based on self-organized nanoporous anodic alumina with unique anisotropy morphology will allow high aspect ratio, high resolution micromachining. Phase I demonstrated that a vacuum microtriode with promising performance could be fabricated from micromachined alumina ceramic. This may be the only technology for making ceramic micro-electromechanical systems (MEMS) for vacuum microelectronics and other applications, that are stable in harsh environments, have mechanical durability, are compatible with mainstream microfabrication, cost less, and scale up suitably. Phase II will optimize the technology and design, fabricate prototypes of vacuum integrated circuits (logic and amplifier), and scale-up the processes of device batch production for evaluation.Potential commercial applications include vacuum microelectronics and MEMS for the harsh environments of space, satelliate communicaitons, radars, deep drilling, nuclear reactors, as well as less strenuous environments that attend such uses as cellular phone networks, flat panel displays, and various sensors