SBIR Phase I: Monolithic Ceramic Pressure Sensors for High Temperatures

SBIR 第一阶段：适用于高温的单片陶瓷压力传感器

• 批准号: 1143395
• 负责人: Dmitri Routkevitch
• 金额: $ 15万
• 依托单位: InRedox LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2012
• 资助国家: 美国
• 起止时间: 2012-01-01 至 2012-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1143395&HistoricalAwards=false
• 关键词: SBIR; Phase; Monolithic; Ceramic; Pressure

This Small Business Innovation Research Phase I project targets development and commercialization of pressure sensors capable of operating at temperatures greater than 650°C for application in gas turbines; aircraft engines and internal combustion engines; in downstream measurements in oil & gas drilling and geo-thermal explorations and in other performance-driven process control systems involving harsh operating conditions. Availability of reliable and inexpensive microsensors for such environments is hindered by the challenge of micromachining refractory materials, such as silicon carbide, diamond or ceramics. As a result, upper operating temperature of the current sensors is limited to ~650°C. This project will employ a novel micromachining process to create monolithic ceramic pressure transducers that can operate at temperatures as high as 850-900°C. The proposed technology is also expected to support a broad dynamic range and have low manufacturing cost. The objectives of Phase I include design and fabrication of preliminary prototypes, demonstration of their high temperature operation, as well as selecting design and packaging options for Phase II development. The expected Phase I results include demonstration of the proposed microstructures, initial performance data and analysis of the feasibility of the proposed approach to meet the market needs at acceptable cost. The broader impact/commercial potential of this project is derived from a new family of products: low-cost pressure sensors for high temperature, harsh environment applications, such as combustion engines, aircraft and industrial turbines, geothermal installations, oil wells and industrial processes. The proposed technology will help enable "intelligent engines" by providing process control in conditions unavailable with existing sensors. Deploying this technology is expected to increase reliability, improve fuel efficiency and reduce the emissions of engines and turbines, resulting in overall reduction of operating cost and better resource utilization. In the long term, the project will also enhance scientific and technological understanding in the MEMS industry by developing a new technology platform that supports a wide range of designs and enables new products. Expanding the materials and process library in the rapidly growing MEMS industry will help deliver critical and value adding functionalities to end users. Societal impacts include reduced pollution, increased fuel efficiency and increased product reliability enabled by intelligent process control using proposed sensors. Combining advanced performance with low manufacturing cost positions this technology for rapid commercialization.

该小型企业创新研究第一阶段项目的目标是开发和商业化能够在高于650°C的温度下工作的压力传感器，用于燃气轮机;飞机发动机和内燃机;石油天然气钻探和地热勘探的下游测量以及其他涉及恶劣操作条件的性能驱动过程控制系统。 可靠且廉价的微传感器在这种环境中的可用性受到诸如碳化硅、金刚石或陶瓷等难熔材料的微机械加工的挑战的阻碍。因此，电流传感器的工作温度上限被限制在~650°C。 该项目将采用一种新颖的微加工工艺来制造单片陶瓷压力传感器，该传感器可在高达850-900°C的温度下工作。 所提出的技术还有望支持宽动态范围并且具有低制造成本。第一阶段的目标包括初步原型的设计和制造，高温操作的演示，以及为第二阶段的开发选择设计和封装选项。 第一阶段的预期结果包括示范拟议的微结构、初步性能数据和分析拟议方法的可行性，以满足市场需求，并以可接受的成本。该项目更广泛的影响/商业潜力来自一个新的产品系列：用于高温、恶劣环境应用的低成本压力传感器，如内燃机、飞机和工业涡轮机、地热装置、威尔斯和工业过程。 拟议的技术将通过在现有传感器无法提供的条件下提供过程控制来帮助实现“智能发动机”。 部署这项技术预计将提高可靠性，提高燃油效率，减少发动机和涡轮机的排放，从而降低整体运营成本，提高资源利用率。 从长远来看，该项目还将通过开发一个新的技术平台，支持广泛的设计和实现新产品，提高MEMS行业的科学和技术理解。 在快速发展的MEMS行业中，扩大材料和工艺库将有助于为最终用户提供关键和增值功能。社会影响包括减少污染，提高燃料效率和提高产品可靠性，通过使用拟议的传感器进行智能过程控制。 将先进的性能与低制造成本相结合，使该技术能够快速商业化。