CAREER: A New Framework of Dynamic Monitoring and Control for Semiconductor Processing

职业：半导体加工动态监控的新框架

• 批准号: 9985074
• 负责人: S. Joe Qin
• 金额: $ 20万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-06-01 至 2005-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9985074&HistoricalAwards=false
• 关键词: CAREER; New; Framework; Dynamic; Monitoring

The PI's research plan consists of theoretical development and a collaboration between the University of Texas at Austin (UT) and Advanced Micro Devices (AMD) to develop the next generation dynamic fault monitoring and control framework for semiconductor processing. AMD has an award from NIST to develop an advanced process control framework (APCFW) jointly with Honeywell. The PI is collaborating with AMD to develop a new generation of monitoring and control methodologies using equipment tool measurements, wafer state measurements, and lab-based wafer electrical tests (WET).This research plan consists of two parts. Part one aims to develop a new dynamic fault monitoring framework using error-in-variables model identification and dynamic structured residuals with maximized sensitivity for fault identification. Part two applies the fault monitoring framework to semiconductor processing and develop a run-to-run control methodology using equipment measurements, optical emission spectroscopy (OES), and WET properties from laboratory tests. Non-intrusive OES sensors developed at Sandia will be used to collect data at very high resolution over a wide spectrum of wavelengths at sub-second sampling intervals. The collaboration with AMD allows the PI to access their manufacturing equipment and real-time data that are not available in a university environment.The education plan emphasizes the integration of research and education in semiconductor processing and fault monitoring and control. Specific tasks will be:1. Develop an undergraduate/professional text on "Unit Operations and Control of Semiconductor Processes" based on this research.2. Develop an internet-based multimedia teaching package to provide students with live demonstrations of engineering concepts and self-paced interactive learning.3. Establish a bi-directional education infrastructure to educate students with practical experience at AMD and educate practicing engineers with modern control.4. Encourage female graduate students to pursue research in process control as women engineers are historically underrepresented in the process control field.

PI的研究计划包括理论发展和德克萨斯大学奥斯汀分校（UT）与高级微设备公司（AMD）之间的合作，以开发下一代半导体加工动态故障监测和控制框架。AMD获得了NIST的授权，与霍尼韦尔共同开发先进的过程控制框架（APCFW）。PI正与AMD合作开发新一代监测和控制方法，使用设备工具测量、晶圆状态测量和基于实验室的晶圆电气测试（WET）。本研究计划由两部分组成。第一部分旨在开发一种新的动态故障监测框架，利用变量误差模型识别和具有最大灵敏度的动态结构化残差进行故障识别。第二部分将故障监测框架应用于半导体加工，并使用设备测量、光学发射光谱（OES）和实验室测试的WET特性开发一种运行到运行的控制方法。桑迪亚开发的非侵入式OES传感器将用于以亚秒采样间隔在宽波长范围内以非常高的分辨率收集数据。与AMD的合作使PI能够访问他们的制造设备和实时数据，这在大学环境中是不可用的。该教育计划强调半导体加工和故障监测与控制的研究与教育的整合。具体任务将是：1。在此研究的基础上编写一篇关于“半导体过程的单元操作和控制”的本科/专业文本。开发一个基于互联网的多媒体教学包，为学生提供工程概念的现场演示和自主步调的互动学习。建立双向的教育基础设施，培养具有AMD实践经验的学生和具有现代控制能力的实践工程师。鼓励女研究生从事过程控制方面的研究，因为女性工程师历来在过程控制领域代表性不足。