Workshop: Manufacturing of Micro-Electro-Mechanical Systems; November 7-8, 2000; Orlando, Florida

研讨会：微机电系统制造；

• 批准号: 0002466
• 负责人: Ampere Tseng
• 金额: $ 2.2万
• 依托单位: Arizona State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-06-01 至 2001-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0002466&HistoricalAwards=false
• 关键词: Workshop; Manufacturing; Micro; Electro; Mechanical

This award is to support a workshop to be held in conjunction with the American Society of Mechanical Engineers Annual Congress and Exhibition, to be held in Orlando, Florida, November 7-8, 2000. The objective of the workshop is to invite participants from industry and academia to discuss opportunities for research collaboration in manufacturing of micro-electro-mechanical systems (MEMS). While tremendous progress has been made in several critical areas, there are four areas that are critical to the manufacturing of MEMS where the fundamental understanding remains at issue. These are the fundamental phenomena of MEMS, MEMS applications in sensing systems, MEMS applications in actuators, and MEMS reliability and packaging.

这一奖项是为了支持将于2000年11月7日至8日在佛罗里达州奥兰多举行的美国机械工程师学会年会和展览会联合举办的研讨会。研讨会的目的是邀请工业界和学术界的与会者讨论在制造微电子机械系统(MEMS)方面开展研究合作的机会。虽然在几个关键领域已经取得了巨大的进展，但有四个领域对MEMS的制造至关重要，在这些领域，基本的理解仍然存在争议。这些是MEMS的基本现象，MEMS在传感系统中的应用，MEMS在致动器中的应用，以及MEMS的可靠性和封装。