Workshop: Manufacturing of Micro-Electro-Mechanical Systems; November 7-8, 2000; Orlando, Florida

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This award is to support a workshop to be held in conjunction with the American Society of Mechanical Engineers Annual Congress and Exhibition, to be held in Orlando, Florida, November 7-8, 2000. The objective of the workshop is to invite participants from industry and academia to discuss opportunities for research collaboration in manufacturing of micro-electro-mechanical systems (MEMS). While tremendous progress has been made in several critical areas, there are four areas that are critical to the manufacturing of MEMS where the fundamental understanding remains at issue. These are the fundamental phenomena of MEMS, MEMS applications in sensing systems, MEMS applications in actuators, and MEMS reliability and packaging.