Creating the Nanogate for Experimental Verification and Development of Flow and Particle Behavior in Sub-Micron Channels

创建 Nanogate 用于亚微米通道中流动和粒子行为的实验验证和开发

• 批准号: 0002934
• 负责人: Alexander Slocum
• 金额: $ 60万
• 依托单位: Massachusetts Institute of Technology
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0002934&HistoricalAwards=false
• 关键词: Creating; Nanogate; Experimental; Verification; Development

The Nanogate is a mechanism that creates and precisely maintains nano-meter level channel openings. This is accomplished by anchoring a cantilever beam at one end, then pivoting about a fulcrum surface; this creates an opening between the beam and an anvil. As part of an NSF exploratory research grant, a prototype was constructed from simply machined parts. In the prototype, 1 micron edge displacement of a 50mm silicon wafer pivoted abound a 15mm diameter anvil resulted in a 50nm gap opening. A diamond turned Nickel plated aluminum structure with 10nm surface finish is currently made for testing; the resulting small annular gap from the new design will allow control of gas flow rates on the order of 1e-12 moles/sec. This research will further develop the Nanogate mechanism and use it to precisely meter molecular flows and study the physics of such flows.This work will result in a new class of instrumentation tools which will enable fundamental experimentation of basic physical phenomena related to fluid flow in very small gaps. Examples of questions that may be answered are: (1)How do molecules behave when a single layer is pulled apart to create force/displacement data? and (2) Why does apparent viscosity increase when the gap gets smaller and how does the boundary behave when one fluid pushes another? The answers to these questions and the enabling instrumentation that are proposed to be developed will have profound influence on areas of high technological importance such as the life sciences, in particular biophysics and biochemistry, energy handling systems such as microengines and micropumps, and new, more accurate metrology/calibration procedures.

Nanogate 是一种创建并精确维持纳米级通道开口的机制。 这是通过在一端锚定悬臂梁，然后绕支点表面旋转来实现的；这会在横梁和砧座之间形成一个开口。 作为美国国家科学基金会探索性研究资助的一部分，原型是由简单加工的零件制成的。 在原型中，50 毫米硅片的 1 微米边缘位移在 15 毫米直径砧座上旋转，导致 50 纳米间隙开口。 目前已制造出具有 10nm 表面光洁度的金刚石车削镀镍铝结构用于测试；新设计产生的小环形间隙将允许将气体流速控制在 1e-12 摩尔/秒的数量级。 这项研究将进一步开发 Nanogate 机制，并用它来精确测量分子流并研究这种流动的物理原理。这项工作将产生一类新型仪器工具，能够对与非常小的间隙中的流体流动相关的基本物理现象进行基础实验。 Examples of questions that may be answered are: (1)How do molecules behave when a single layer is pulled apart to create force/displacement data? （2）为什么当间隙变小时，表观粘度会增加？当一种流体推动另一种流体时，边界如何表现？ 这些问题的答案以及拟开发的辅助仪器将对生命科学（特别是生物物理学和生物化学）等高科技领域、微发动机和微泵等能量处理系统以及新的、更准确的计量/校准程序产生深远的影响。