SBIR/STTR Phase II: Sol-Gel Processed Thin-Film Nitrogen Oxides Sensors

0078730 Aruchamy这个小企业创新研究（SBIR）第二阶段项目将开发薄膜氮氧化物传感器的基础上，通过溶胶-凝胶处理新的二相纳米复合材料。 溶胶-凝胶工艺为传感器制造提供了许多优点，包括微结构的纳米工程的便利性和多功能性。 在阶段I中，这样的传感器元件已经显示出比通过常规处理的相同组成的粉末衍生的传感器元件更好的微结构、增强的灵敏度和更快的响应速度。 薄膜传感器可以容易地与硅微电子技术结合，并且方便地允许小型化、低工艺成本和高再现性。 第二阶段将通过溶胶-凝胶工艺系统地优化二元薄膜氮氧化物传感器的工艺、微结构和性能，该研究有望在可靠、紧凑的固态化学传感器中获得潜在的商业应用。 这项创新有望为汽车排放控制、工业过程控制和环境监测提供高稳定性和高灵敏度的薄膜氮氧化物传感器。 这些传感器可以用作独立的传感设备，也可以用作集成到片上多功能传感器和智能结构中的传感单元。

0078730AruchamyThis Small Business Innovation Research (SBIR) Phase II project will develop thin-film nitrogen oxide sensors based on novel binary-phased nanocomposites by sol-gel processing. Sol-gel processing offers many advantages for sensor fabrication, including facility and versatility for nano-engineering of the microstructure. In Phase I, such sensor elements have shown much improved microstructure, enhanced sensitivity, and faster response speed than powder-derived sensor elements of the same composition by conventional processing. Thin-film sensors can be readily incorporated with silicon microelectronic technology and conveniently allow miniaturization, low process costs, and high reproducibility. Phase II will systematically optimize the processing, microstructure, and performance of the binary-phased thin-film nitrogen oxides sensors by sol-gel processing.Potential commercial applications of the research are expected in reliable, compact solid-state chemical sensors. This innovation is expected to provide highly stable and sensitive thin-film nitrogen oxides sensors for automotive emission control, industrial processing control, and environmental monitoring. These sensors may be used as stand-alone sensing devices or as sensing units to be integrated into on-chip multifunctional sensors and smart structures.