SBIR/STTR Phase II: Sol-Gel Processed Thin-Film Nitrogen Oxides Sensors

SBIR/STTR 第二阶段：溶胶-凝胶处理薄膜氮氧化物传感器

• 批准号: 0078730
• 负责人: Ayyasamy Aruchamy
• 金额: $ 40万
• 依托单位: AMSEN TECHNOLOGIES LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-08-15 至 2002-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0078730&HistoricalAwards=false
• 关键词: SBIR; STTR; Phase; II; Sol

0078730AruchamyThis Small Business Innovation Research (SBIR) Phase II project will develop thin-film nitrogen oxide sensors based on novel binary-phased nanocomposites by sol-gel processing. Sol-gel processing offers many advantages for sensor fabrication, including facility and versatility for nano-engineering of the microstructure. In Phase I, such sensor elements have shown much improved microstructure, enhanced sensitivity, and faster response speed than powder-derived sensor elements of the same composition by conventional processing. Thin-film sensors can be readily incorporated with silicon microelectronic technology and conveniently allow miniaturization, low process costs, and high reproducibility. Phase II will systematically optimize the processing, microstructure, and performance of the binary-phased thin-film nitrogen oxides sensors by sol-gel processing.Potential commercial applications of the research are expected in reliable, compact solid-state chemical sensors. This innovation is expected to provide highly stable and sensitive thin-film nitrogen oxides sensors for automotive emission control, industrial processing control, and environmental monitoring. These sensors may be used as stand-alone sensing devices or as sensing units to be integrated into on-chip multifunctional sensors and smart structures.

0078730AruchamySmall Business Innovation Research(SBIR)第二阶段项目将通过溶胶-凝胶工艺开发基于新型双相纳米复合材料的薄膜氮氧化物传感器。Sol-Gel工艺为传感器的制作提供了许多优点，包括用于微结构的纳米工程的简便性和通用性。在第一阶段，这种传感器元件表现出比传统工艺的相同成分的粉末衍生传感器元件更好的微结构、更高的灵敏度和更快的响应速度。薄膜传感器可以很容易地与硅微电子技术结合在一起，方便地实现小型化、低工艺成本和高重复性。第二阶段将通过溶胶-凝胶法对二相薄膜氮氧化物传感器的工艺、微结构和性能进行系统的优化。这项研究有望在可靠、紧凑的固态化学传感器中得到潜在的商业应用。这一创新有望为汽车排放控制、工业过程控制和环境监测提供高度稳定和灵敏的薄膜氮氧化物传感器。这些传感器可以用作独立的传感设备，也可以用作集成到片上多功能传感器和智能结构中的传感单元。