Acquisition of a Plasma Science Research and Research Training Laboratory at UTD.

收购 UTD 等离子体科学研究和研究培训实验室。

• 批准号: 0079783
• 负责人: Lawrence Overzet
• 金额: $ 58万
• 依托单位: University of Texas at Dallas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-08-15 至 2003-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0079783&HistoricalAwards=false
• 关键词: Acquisition; Plasma; Science; Research; Training

CTS-0079783Lawrence J. OverzetUniversity of Texas at DallasMRI: Acquisition of a Plasma Science Research and Research Training LaboratoryAbstractThe acquisition and development of a plasma science teaching and research laboratory is a joint effort among 5 faculty members in the Schools of Engineering and Computer Science and Natural Science and Mathematics at the University of Texas at Dallas. The laboratory development provides five distinct plasma stations with related diagnostics on each system. The five plasma-generation systems and the diagnostics for them offer a diverse research-training experience for students. As these plasma systems were chosen to reflect the research interests of the faculty, this laboratory also provides a fertile research environment for the PIs. The facilities installed are the following: 1] an inductively coupled plasma (ICP) system with a residual gas analyzer, a Fourier Transform Infrared (FTIR) spectrometer, and an Absorption Spectroscopy (AS) system; 2] a dc/pulsed magnetron source for sputter deposition of films with optical emission spectroscopy (OES) and deposited film analysis; 3] a hollow cathode discharge source with a microwave interferometer and Langmuir probes; 4] a dc/rf parallel plate plasma source with an FTIR spectrometer, deposited film analysis, Langmuir probe and current-voltage probes; and 5] various lamps with OES, AS, and current-voltage measurement capabilities. The plasma science laboratory provides a research training capability at UTD for both undergraduate (upper level) and graduate students in Engineering and the Natural Sciences. It encompasses a strong teaching component, resonates with the needs of local industry, and can potentially address needs of further removed industry. It will undoubtedly be used to train non-traditional students as well. The extensive research backgrounds and interests of the investigators in semiconductor processing (etching deposition and doping), lighting plasmas, and space plasmas allow students, as well as technical and research staff from local industry, to learn about basic plasma processes and diagnostics in the expanding fields of plasma science and technology. The Laboratory also enhances the research capabilities and teaming of the five collaborating researchers along with other investigators in both academe and industry. The lab is housed in modern clean room facilities, and consequently the equipment is suitable for both research training and for advanced research programs in materials processing, device manufacturing, and lighting.

CTS-0079783 Lawrence J.Overzet of Texas University at Dallas MRI：收购等离子体科学研究和研究培训实验室摘要收购和开发等离子体科学教学和研究实验室是德克萨斯大学达拉斯分校工程学院、计算机学院、自然科学学院和数学学院的5名教职员工共同努力的成果。实验室开发提供了五个不同的等离子体站，每个系统都有相关的诊断。五个等离子体产生系统及其诊断为学生提供了多样化的研究培训体验。由于选择这些等离子体系统是为了反映教职员工的研究兴趣，该实验室也为PI提供了一个肥沃的研究环境。安装的设备包括：1)一个带有残留气体分析仪、傅里叶变换红外(FTIR)光谱仪和吸收光谱(AS)系统的电感耦合等离子体(ICP)系统；2)一个用于溅射沉积薄膜的直流/脉冲磁控源，包括光学发射光谱(OES)和沉积薄膜分析；3)一个带有微波干涉仪和朗缪尔探头的空心阴极放电源；4)一个DC/RF平行板等离子体源，带FTIR光谱仪、沉积膜分析、朗缪尔探头和电流-电压探头；以及5)各种灯具，具有OES、AS、和电流-电压测量功能。在UTD，等离子体科学实验室为工程和自然科学的本科生和研究生提供研究培训能力。它包含一个强大的教学组成部分，与当地行业的需求产生共鸣，并有可能满足进一步取消的行业的需求。毫无疑问，它也将被用来培训非传统学生。研究人员在半导体加工(蚀刻沉积和掺杂)、照明等离子体和空间等离子体方面具有广泛的研究背景和兴趣，使学生以及来自当地行业的技术和研究人员能够在不断扩大的等离子体科学和技术领域了解基本的等离子体工艺和诊断。该实验室还加强了五名合作研究人员与学术界和产业界其他研究人员的研究能力和合作。该实验室位于现代化的洁净室设施中，因此该设备既适用于研究培训，也适用于材料加工、设备制造和照明方面的高级研究项目。