MRI: Acquisition of Electron-Beam Lithography for Nanofabrication in the North Texas Region

MRI：在北德克萨斯地区采购用于纳米加工的电子束光刻技术

• 批准号: 1126224
• 负责人: Lawrence Overzet
• 金额: $ 70万
• 依托单位: University of Texas at Dallas
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1126224&HistoricalAwards=false
• 关键词: MRI; Acquisition; Electron; Beam; Lithography

Research Objectives and Approaches: The objective of this research is to enable the highest level nanoscale research within the entire north Texas region. The approach is to acquire a Raith e-LiNE Plus E-Beam Lithography (EBL) tool. It will be placed in the UTD Cleanroom Research Laboratory (CRL) to provide advanced lithographic capabilities. There is no EBL capability in north Texas to facilitate university and corporate research. Intellectual Merit: This EBL tool will accelerate existing research and enable new research avenues in an astonishing array of fields. Example areas enhanced include: Nanoscale Electronic Devices, Sensors, Manufacturing, Materials, and Photonics. Many researchers will be enabled by this EBL tool combined with the capabilities already resident in the CRL. The CRL has a large and growing user base (210) and the capability to make this EBL tool productive in the long term. UTD faculty and staff, together with colleagues throughout north Texas have the funding and expertise to make the most of this capability. Broader Impacts: The EBL acquisition will enhance a broad range of activities, people, research areas, and institutions. It will enhance research and education in the CRL including a variety of classes in multiple disciplines, both graduate and undergraduate (crucial to UTD?s teaching mission). In addition, it will enhance the training of high school students through summer research programs. All nanoscale research can be enhanced and it will foster new industrial collaborations. It will enable the researchers of numerous major universities and companies throughout north Texas and beyond.

研究目标和方法：这项研究的目标是在整个德克萨斯州北部地区实现最高水平的纳米级研究。方法是获得RAITH e-line Plus电子束光刻(EBL)工具。它将被放置在UTD洁净室研究实验室(CRL)，以提供先进的光刻能力。德克萨斯州北部没有为大学和企业研究提供便利的EBL能力。智力优势：这个EBL工具将加速现有的研究，并在令人震惊的一系列领域中开辟新的研究途径。增强的示例领域包括：纳米电子设备、传感器、制造、材料和光子学。许多研究人员将通过这种EBL工具与CRL中已有的功能相结合而得到支持。CRL拥有庞大且不断增长的用户基础(210)，并有能力使这一EBL工具长期具有生产力。得克萨斯大学的教职员工和整个北得克萨斯州的同事都有资金和专业知识来最大限度地利用这种能力。更广泛的影响：收购EBL将增强广泛的活动、人员、研究领域和机构。它将加强CRL的研究和教育，包括多学科的各种课程，包括研究生和本科生(对加州大学S的教学使命至关重要)。此外，它还将通过暑期研究项目加强对高中生的培训。所有纳米级的研究都可以得到加强，这将促进新的产业合作。它将使德克萨斯州北部及更远地区众多主要大学和公司的研究人员能够参与其中。