Development of Novel In-Situ Tests and Modeling for Integrated MEMS Research and Education

开发用于集成 MEMS 研究和教育的新型原位测试和建模

• 批准号: 0085122
• 负责人: Kevin Murphy
• 金额: $ 21.3万
• 依托单位: University of Connecticut
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-01-01 至 2004-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0085122&HistoricalAwards=false
• 关键词: Development; Novel; Situ; Tests; Modeling

Agency: NSF - Civil and Mechanical Systems (Alison Flatau)PI's: Kevin D. Murphy and Matthew R. Begley University of ConnecticutProposal #: 0085122Title: Development of Novel In-Situ Tests and Modeling for Integrated MEMS Research and Education300 WORD PROJECT SUMMARY The performance of micro-electro-mechanical-systems (MEMS) is strongly influenced by adhesive forces and surface energies. In some regimes, these quantities cause device failure, when components come into sticking contact and cannot continue to perform their designated task. In order to identify acceptable operating regimes, significant advances are needed in our ability to quantify close range attractive forces and adhesion energies. This program will develop (i) novel experimental techniques to characterize these quantities in-situ and (ii) physics-based models to predict component performance when adhesion and stick-release events are critical factors. Both quasi-static and dynamic behavior of a model MEMS system will be studied, with an emphasis on the transition between sticking and no-stick regimes. These studies will determine if and when dynamic excitation may be used initiate and control stick-release events. Such information may be used to design novel vibratory assembly processes used to manufacture complex MEMS. A state-of-the-art nanoindentation facility will be integrated with an idealized MEMS device to directly measure forces and displacements at the micron level. In addition to established dynamic measurement techniques used in nanoindentation systems, a combination of electronic and optical measurements will be implemented. Adhesive energies, electrostatic forces, and the dynamic response of the MEMS device will be quantified during both mechanical and electrical excitation. The measured MEMS behavior will be used to validate a combination of analytical and numerical models that incorporate electrostatic forces and surface energies. These models will be used to predict a priori transient dynamic response, including stick and stick-release events. The proposed program integrates research and education through the development of a MEMS test facility. Graduate and undergraduate research assistants will design and fabricate test rigs and will contribute to model development. Students will also spend time collaborating with the Micro-Technology Group at the Lawrence Livermore National Laboratory.

机构：美国国家科学基金会-土木与机械系统（Alison Flatau）PI's: Kevin D. Murphy和Matthew R. Begley康涅狄格州大学提案号：0085122标题：开发集成MEMS的新型原位测试和建模研究与教育300字项目摘要：微机电系统（MEMS）的性能受到粘附力和表面能的强烈影响。在某些情况下，当组件发生粘接并不能继续执行其指定任务时，这些数量会导致设备故障。为了确定可接受的操作制度，我们需要在量化近距离引力和粘附能的能力方面取得重大进展。该计划将开发(i)新颖的实验技术来表征这些原位数量，（ii）基于物理的模型来预测当粘附和粘脱事件是关键因素时组件的性能。将研究模型MEMS系统的准静态和动态行为，重点是粘接和不粘接之间的过渡。这些研究将决定是否以及何时可以使用动态激励来启动和控制杆释放事件。这些信息可用于设计用于制造复杂MEMS的新型振动装配工艺。最先进的纳米压痕设备将与理想的MEMS设备集成，以直接测量微米级的力和位移。除了在纳米压痕系统中使用的已建立的动态测量技术外，还将实施电子和光学测量的结合。在机械和电激励过程中，MEMS器件的粘附能、静电力和动态响应将被量化。测量的MEMS行为将用于验证包含静电力和表面能的分析和数值模型的组合。这些模型将用于预测先验的瞬态动态响应，包括木棍和木棍释放事件。该计划通过开发MEMS测试设施将研究和教育相结合。研究生和本科生研究助理将设计和制造测试平台，并将有助于模型开发。学生们还将花时间与劳伦斯利弗莫尔国家实验室的微技术小组合作。