New Technologies for the Environment: Vapor Deposition of Photoimageable Dielectric Films

环境新技术：光成像介电薄膜的气相沉积

• 批准号: 0086834
• 负责人: Gregory Raupp
• 金额: $ 10万
• 依托单位: Arizona State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2000
• 资助国家: 美国
• 起止时间: 2000-09-15 至 2003-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0086834&HistoricalAwards=false
• 关键词: New; Technologies; Environment; Vapor; Deposition

This New Technologies for the Environment project will demonstrate the proof-of-concept for vapor deposition of photoimageable dielectric polymer films through an integrated experimental investigation that will provide fundamental understanding of thin film processing, properties and performance capabilities and limitations. If successful, this research will lay the foundation for realization of significant environmental advantages in printed circuit board manufacture and in advanced microelectronics packaging. The inherent photosensitivity of the polymer films will allow the elimination of a significant number of waste-generating process steps from the overall manufacturing process flow, and the production of the thin films through vapor deposition will eliminate solvent wastes in precursor production, thin film application, and shelf-life expiration.This research will address key barrier issues inhibiting the implementation of photoimageable dielectric technology. Focus will be on auto-photosensitive film deposition from pyromellitic dianhydrides and co-monomers from the ortho-aliphatic di-substituted diaminodiphenylmethane series. Life Cycle Analyses will be conducted to demonstrate the environmental benefits of the technology including minimal emissions, solvent-free film production, and high precursor utilization.

该环境新技术项目将通过综合实验研究展示光成像介电聚合物薄膜气相沉积的概念验证，该实验研究将提供对薄膜加工，性能和性能能力以及限制的基本了解。如果成功的话，这项研究将为实现印刷电路板制造和先进微电子封装的显著环境优势奠定基础。 聚合物薄膜的固有光敏性将允许从整个制造工艺流程中消除大量产生废物的工艺步骤，并且通过气相沉积生产薄膜将消除前体生产、薄膜应用和保质期到期中的溶剂废物。这项研究将解决阻碍光成像电介质技术实施的关键障碍问题。重点将放在自动感光膜沉积从苯均四酸二酐和共聚单体从邻脂肪族二取代二氨基二苯基甲烷系列。将进行生命周期分析，以证明该技术的环境效益，包括最小的排放，无溶剂薄膜生产和高前体利用率。