Fabrication Processes for Mesoscopic Systems

该研究项目在伊利诺伊大学香槟分校化学系进行，旨在了解金属和金属间微结构的生长和相演变。Ralph Nuzzo教授和他的同事们正在探索成核、表面化学和动力学在控制CVD生长薄膜形态方面所起的作用。在分析和表面化学项目的支持下，这些材料在不同长度尺度上的图案形成正在被检查，重点是通过软光刻和自组装的图案。用于化学活性力传感器的功能材料的复杂组件正在开发中。了解材料微观结构的生长和发展对功能材料的控制设计至关重要。本研究项目在分析和表面化学项目的支持下，解决了薄膜生长机制和最终形态的问题。复杂的中尺度结构的合成和表征，着眼于应用在化学主动力转导。

This research project, carried out in the Department of Chemistry at the University of Illinois at Urbana-Champaign, works to develop an understanding of the growth and phase evolution of metallic and intermetallic microstructures. Professor Ralph Nuzzo and his colleagues are probing the roles played by nucleation, surface chemistry, and dynamics in controlling the morphology of CVD grown thin films. With the support of the Analytical and Surface Chemistry Program, pattern formation in these materials over various length scales are being examined, with a focus on patterning by soft lithography and self-assembly. Complex assemblies of functional materials, useful as chemically active force transducers are being developed. An understanding of the growth and development of material microstructures is essential to the controlled design of functional materials. This research project, with the support of the Analytical and Surface Chemistry Program, addresses questions of the mechanism of thin film growth and resulting morphology. Complex mesoscale structures are synthesized and characterized, with an eye toward application in chemically active force transduction.