Fabrication Processes for Mesoscopic Systems

介观系统的制造工艺

• 批准号: 0097096
• 负责人: Ralph Nuzzo
• 金额: $ 49.8万
• 依托单位: University of Illinois at Urbana-Champaign
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-07-01 至 2004-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0097096&HistoricalAwards=false
• 关键词: Fabrication; Processes; Mesoscopic; Systems

This research project, carried out in the Department of Chemistry at the University of Illinois at Urbana-Champaign, works to develop an understanding of the growth and phase evolution of metallic and intermetallic microstructures. Professor Ralph Nuzzo and his colleagues are probing the roles played by nucleation, surface chemistry, and dynamics in controlling the morphology of CVD grown thin films. With the support of the Analytical and Surface Chemistry Program, pattern formation in these materials over various length scales are being examined, with a focus on patterning by soft lithography and self-assembly. Complex assemblies of functional materials, useful as chemically active force transducers are being developed. An understanding of the growth and development of material microstructures is essential to the controlled design of functional materials. This research project, with the support of the Analytical and Surface Chemistry Program, addresses questions of the mechanism of thin film growth and resulting morphology. Complex mesoscale structures are synthesized and characterized, with an eye toward application in chemically active force transduction.

该研究项目在伊利诺伊大学厄巴纳-香槟分校化学系进行，旨在了解金属和金属间微结构的生长和相演变。Ralph Nuzzo教授和他的同事们正在探索成核、表面化学和动力学在控制CVD生长薄膜形态中所起的作用。 在分析和表面化学计划的支持下，正在研究这些材料在各种长度尺度上的图案形成，重点是通过软光刻和自组装进行图案化。 正在开发功能材料的复杂组件，可用作化学活性力传感器。了解材料微观结构的生长和发展对于功能材料的可控设计至关重要。 该研究项目在分析和表面化学项目的支持下，解决了薄膜生长机制和由此产生的形态问题。 复杂的介观结构的合成和表征，着眼于化学活性力转导的应用。