Production-Oriented VDDT and IDDQ Device Testing Methods Based on Multiple Power Supply Pad Measurements

国际半导体技术路线图确定了数字和混合信号器件创新测试和诊断方法的需求。由于几个原因，传统的测试策略变得不那么有效。随着器件工作频率的增加，能够以器件的固有速度（全速）测试器件的功能测试设备的成本变得成本过高。 使用较慢、较便宜的测试设备的测试方法需要能够检测导致高速延迟故障的缺陷。这些设备日益增加的复杂性和多样性也使得难以访问内部节点并实现良好的故障覆盖和参数设备信息。技术趋势，如器件漏电流的增加，降低了IDDQ等替代测试的有效性。本研究旨在通过调查器件瞬态和新型静态信号技术来解决这些不足。在以前的工作中，工艺容限的VDDT和IDDQ方法已被证明（1）检测电阻短路和开路缺陷，（2）预测无缺陷器件的性能，以及（3）预测有缺陷器件中的缺陷位置。这些方法是基于多个静态和瞬态电源信号的互相关。 互相关用于校准工艺和技术相关的变化，例如晶体管beta的偏移和漏电流的增加。本研究的重点是这些技术在生产测试环境中的实施，并确定其能力和局限性。与工业合作伙伴一起研究了该方法对大型商业设备的可扩展性。生产测试环境问题，如测量噪声和仪器采样要求，测试生成策略和专用硬件也进行了研究。

The International Technology Roadmap for Semiconductors identifies a need for innovative testing and diagnostic methods for digital and mixed-signal devices. Traditional testing strategies are becoming less effective for several reasons. As device operational frequencies increase, the cost of functional test equipment, capable of testing devices at their native speed (at-speed), is becoming cost prohibitive. Testing methods which use slower, cheaper test equipment need to be able to detect defects that cause at-speed delay failures. The increasing complexity and diversity of these devices also make it difficult to access internal nodes and achieve good fault coverage and parametric device information. Technology trends, such as increases in device leakage currents, have reduced the effectiveness of alternative tests such as IDDQ. This research is designed to address these short-coming by investigating device transient and novel quiescent signal techniques. In previous work, process-tolerant VDDT and IDDQ methods have been demonstrated to (1) detect resistive shorting and open defects, (2) predict performance in defect-free devices, and (3) predict defect location in defective devices. These methods are based on the cross-correlation of multiple static and transient power supply signals. Cross-correlation is used to calibrate for process and technology-related variations, such as shifts in transistor betas and increases in leakage current. This research focuses on the implementation of these techniques in a production test environment, and on identifying their capabilities and limitations. The scalability of the methods to large commercial devices is investigated with industrial partners. Production test environment issues, such as measurement noise and instrumentation sampling requirements, test generation strategies and specialized hardware are also investigated.