SBIR Phase I: Ultrafast Total Organic Carbon (TOC) Analyzer for Water Recycling Systems

这个小型企业创新研究(SBIR)第一阶段项目致力于开发一种超高速TOC分析仪，以实现半导体湿法工作台中废漂洗水的实时回收。目前，半导体制造设施每个晶片产生约3800加仑的废水排放，相当于以每分钟100加仑(GPM)的速度运行的设施每年产生5300万加仑的废水。回收半导体湿法工作台的废漂洗水提供了一种可行的解决方案，可以显著减少这一制造过程对环境的影响。对关键污染物的在线实时监测是成功运行未来具有循环和再利用能力的水系统所必需的。第一阶段的研究将致力于开发具有可靠、超快响应时间的微流控传感器，以跟踪半导体湿法工作台废R5Inse水中发现的有机污染物浓度。一期设备的具体性能目标包括：30 S响应时间，30 ppb检测下限，在10微西曼/厘米水电导下运行，关键污染物100%+/-30%回收率。将开发一种超快速总有机碳分析仪，能够实时回收半导体制造所用水，以减少他们对地区供水的需求。这种新型仪器将在半导体行业以及其他需要实时检测含水废水中有机污染物的制造环境中得到广泛应用。

This Small Business Innovation Research (SBIR) Phase I project addresses the development of an ultrafast TOC analyzer to enable real-time recycling of spent rinse waters from semiconductor wet benches. At the present time, semiconductor fabrication facilities generate about 3800 gallons of wastewater discharge per wafer, which is equivalent to 53 million gallons of wastewater per year for facilities operating at 100 gpm (gallons per minute). Recycling spent rinse waters from semiconductor wet benches provides a viable solution to dramatically reduce the environmental impact of this manufacturing process. On-line monitoring of key contaminants in real time is necessary to successfully operate future water systems having recycle and reuse capabilities. Phase I research will be directed at developing microfluidic sensors having reliable, ultra-fast response times to trace concentrations of organic contaminants found in spent r5inse waters from simiconductor wet benches. Specific performance goals for Phase I devices include: 30 s response time, 30 ppb detection limit, operation in 10 microSiemen/cm water conductivity, and 100% +/- 30% recovery of key contaminants.An ultra-fast TOC analyzer will be developed that enables real-time recycling of water used by seimiconductor manufacturing to reduce their demand upon regional water supplies. This novel instrument will find widespread applications in the semiconductor industry as well as other manufacturing environments that require real-time detection of organic contaminants in aqueous effluent.