SBIR Phase II: Development of a Dynamic, High-Resolution Volumetric Dilatometer

这个小企业创新研究（SBIR）二期项目将开发与光电二极管（光学传感器）和先进材料表征的光电仪器有关的创新。具体来说，该项目将开发第一个商用高分辨率体积膨胀计。此外，这些创新将允许：(1)线性膨胀计的分辨率比传统的线性膨胀计高2-3个数量级；(2)微平移台光学控制系统；(3)用于薄膜表征的光电极，其线性分辨率超过1纳米；(4)一种超高速、高分辨率光谱仪，将使适用于恶劣环境的三种光学传感器（压力、温度和负载）商业化。潜在的商业应用有望在电子和微电子制造中的扩张测量，薄膜分析，微平移阶段，超快速光谱和各种光学传感器。

This Small Business Innovative Research (SBIR) Phase II project will develop innovations pertaining to optrodes (optical sensors) and electro-optical instrumentation for advanced material characterization. Specifically, this project will develop the first commercially available high-resolution volumetric dilatometer. In addition, the innovations will allow for: (1) a linear dilatometer that possesses a resolution that is 2-3 orders of magnitude better than its conventional linear counterparts; (2) an optical control system for micro-translation stages; (3) an optrode for thin film characterization that possesses a linear resolution exceeding 1 nanometer; and (4) an ultra-fast, high-resolution spectrometer that will enable commercialization of three optical sensors (pressure, temperature, and load) suitable for harsh environments.Potential commercial applications are expected in electronics and microelectronics manufacturing for dilatometry, thin films analysis, micro-translation stages, ultra-fast spectroscopy, and various optical sensors.