SBIR Phase II: Development of a Dynamic, High-Resolution Volumetric Dilatometer

这个小型企业创新研究（SBIR）第二阶段项目将开发与光电极（光学传感器）和先进材料表征的光电仪器有关的创新。 具体而言，该项目将开发第一个商业上可用的高分辨率体积流量计。 此外，这些创新将允许：（1）具有比其常规线性对应物好2-3个数量级的分辨率的线性光电倍增管;（2）用于微平移台的光学控制系统;（3）具有超过1纳米的线性分辨率的用于薄膜表征的光极;以及（4）一个超快、高分辨率的光谱仪，它将使三种光学传感器商业化（压力、温度和负载）。预期潜在的商业应用在电子和微电子制造中用于电阻率测量、薄膜分析，微平移台、超快光谱和各种光学传感器。

This Small Business Innovative Research (SBIR) Phase II project will develop innovations pertaining to optrodes (optical sensors) and electro-optical instrumentation for advanced material characterization. Specifically, this project will develop the first commercially available high-resolution volumetric dilatometer. In addition, the innovations will allow for: (1) a linear dilatometer that possesses a resolution that is 2-3 orders of magnitude better than its conventional linear counterparts; (2) an optical control system for micro-translation stages; (3) an optrode for thin film characterization that possesses a linear resolution exceeding 1 nanometer; and (4) an ultra-fast, high-resolution spectrometer that will enable commercialization of three optical sensors (pressure, temperature, and load) suitable for harsh environments.Potential commercial applications are expected in electronics and microelectronics manufacturing for dilatometry, thin films analysis, micro-translation stages, ultra-fast spectroscopy, and various optical sensors.