Development of a Variable Temperature Near-field Scanning Acoustic Microscope with Rapid Sample Access

开发具有快速样品存取功能的变温近场扫描声学显微镜

• 批准号: 0114183
• 负责人: Bellave Shivaram
• 金额: $ 13万
• 依托单位: University of Virginia Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2001
• 资助国家: 美国
• 起止时间: 2001-08-01 至 2006-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0114183&HistoricalAwards=false
• 关键词: Development; Variable; Temperature; Near; field

This award from the Instrumentation for Materials Research program will enable the University of Virginia to develop a variable temperature near field scanning acoustic microscope to map elastic properties on a nanometer scale on solids of interest to physics, chemistry, materials science, biology and engineering and to enhance teaching in the physics undergraduate laboratory. The microscope will use custom designed scanning heads with integrated cantilever sensors capable of operation at low temperatures and interfaced to existing control electronics. A low vibration refrigerator of the pulse tube type (which has no moving parts) will be acquired and used to cool the scanning head. The choice of the pulse tube refrigerator (which operate in any physical orientation) enables the positioning of the scanning head on top facilitating rapid sample access. The integrated cantilever sensing scheme will simplify the future marriage of the microscope to other instruments such as electron microscopes. It will also enable study of biological samples and solid liquid interfaces where optical detection schemes do not work.. The integrated detection scheme should also be attractive to emerging industrial microelectronics where rapid nanometer scale flaw detection is desired.This award from the Instrumentation for Materials Research program, the University of Virginia will develop a new microscope using high frequency sound waves and operating over a wide temperature range to map elastic features on a nanometer length scale in solid state materials of interest to physics, materials science, biology and engineering as well as to enhance teaching in the physics undergraduate laboratory. The microscope will be of the scanning type and images will be obtained digitally. The acoustic sensor for the microscope will be fabricated using integrated microelectronic technologies. This integrated sensor scheme simplifies the future marriage of the proposed microscope to other instruments such as electron microscopes. It will also enable the imaging of biological samples and solid liquid interfaces with resolution better than that obtained optically. The development of this new scanning acoustic microscope will benefit the study of crystalline and non-crystalline solids and will have a wide ranging impact including in the area of emerging microelectronic processes where rapid nanometer scale flaw detection is desired.

该奖项将使弗吉尼亚大学能够开发一种可变温度近场扫描声学显微镜，以在物理，化学，材料科学，生物学和工程感兴趣的固体上绘制纳米尺度的弹性特性，并加强物理本科实验室的教学。 该显微镜将使用定制设计的扫描头，集成悬臂传感器，能够在低温下工作，并与现有的控制电子设备连接。将获得脉冲管型低振动制冷机（无移动部件），并用于冷却扫描头。 选择脉冲管制冷机（可在任何物理方向上运行）可将扫描头定位在顶部，便于快速取用样品。 集成的悬臂梁传感方案将简化显微镜与其他仪器（如电子显微镜）的未来婚姻。 它还将使生物样品和固液界面的研究，光学检测方案不工作。集成检测方案也应该是有吸引力的新兴工业微电子，其中快速纳米尺度的缺陷检测是理想的。这项来自材料研究项目仪器的奖项，弗吉尼亚大学将开发一种新的显微镜，使用高频声波和在宽温度范围内工作，以映射物理学感兴趣的固态材料中纳米长度尺度的弹性特征，材料科学、生物学和工程以及加强物理本科实验室的教学。显微镜将是扫描型的，图像将以数字方式获得。显微镜的声传感器将使用集成微电子技术制造。 这种集成的传感器方案简化了未来的婚姻提出的显微镜，以其他仪器，如电子显微镜。 它还将使生物样品和固液界面的成像具有比光学获得的分辨率更好的分辨率。这种新的扫描声学显微镜的发展将有利于晶体和非晶体固体的研究，并将产生广泛的影响，包括在新兴的微电子工艺领域的快速纳米级探伤是理想的。